Reaction Sintered Silicon Carbide Member Joining
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Solution Overview
Problem
Conventional methods face challenges in producing large-sized reaction sintered silicon carbide members with complicated shapes, particularly for applications like EUV exposure apparatuses, where high mechanical and thermal stability is required, and the generation of particles during fabrication is a significant issue.
Innovation Solution
The development of a reaction sintered silicon carbide member with a specific design that includes multiple members joined together using intermediate and fillet regions made of reaction sintered silicon carbide, featuring inclined surfaces and controlled curvature radii to enhance washability and cleanability, reducing particle generation during assembly.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If conventional methods are used to produce fine ceramic materials, then high rigidity and small thermal expansion coefficient are achieved, but it is difficult to produce large-sized structures with complicated shapes
Solution Approach 1:
The large-sized measuring structure is divided into multiple separate ceramic components that are produced individually using conventional fine ceramic manufacturing methods, then assembled together using the reaction sintered silicon carbide joining technology to form the complete large-scale structure
Solution Approach 2:
The invention changes the manufacturing approach by using reaction sintering process that allows ceramic materials to be formed and joined in a single integrated process, enabling the production of large-sized complicated shapes while maintaining the high rigidity properties of fine ceramic materials
2Reliability
If the measuring structure has a complicated shape to accommodate optical elements, then precise position retention is improved, but particle generation during fabrication increases
Solution Approach 1:
The reaction sintering process parameters are optimized to enable forming and joining in a single step, reducing the number of fabrication operations and thereby minimizing particle generation while maintaining the complicated shape required for precise optical element positioning
3Length of stationary object
If the measuring structure size increases to one meter level for EUV exposure apparatus, then the apparatus capacity is improved, but the difficulty of producing large-sized complicated shapes increases
Solution Approach 1:
The one-meter level measuring structure is segmented into multiple manageable ceramic components that can be produced using existing manufacturing capabilities, then assembled into the complete large-scale structure through the reaction sintered joining process
Solution Approach 2:
The invention uses composite construction by joining multiple ceramic components together to create the large-sized measuring structure, combining the advantages of fine ceramic materials with the feasibility of modular assembly for large-scale applications
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design allows for the production of large and complex-shaped ceramic members with improved mechanical properties, reduced particle generation, and enhanced cleanability, enabling precise fabrication and increased reliability for applications such as EUV exposure apparatuses.
Implementation Method 1
a reaction sintered silicon carbide member, characterized by including: a first member (10) made of reaction sintered silicon carbide; a second member (20) made of reaction sintered silicon carbide
Data Source
Figure 1A~1B
Figure 2A~2B
Figure 3A~3E
AI summary
Provided is a reaction sintered silicon carbide member making it possible to produce a large-sized ceramic member having a complicated shape, or to restrain the generation of particles from the member. The reaction sintered silicon carbide member has a first member (10) made of reaction sintered silicon carbide; a second member (20) made of reaction sintered silicon carbide and having a first face (20fa), a second face (20fb) at a side of the second member (20) that is opposite to the first face (20fa) side thereof, and a first end face (20s) connected to the first and second faces (20fa) and (20fb); and a joining portion (30) which joins the first and second members (10) and (20) to each other. The joining portion (30) has an intermediate region (33) which joins the first member (10) and the first end face (20s) to each other, and is made of reaction sintered silicon carbide, and a first region (31) which joins the first member (10), the first face (20fa) and the intermediate region (33) to one another, and is made of reaction sintered silicon carbide.