Optical Measurement of Transparent SiC Using Internal Reflection
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Solution Overview
Problem
Existing optical measurement systems, such as spectrometers, struggle to accurately measure the optical characteristics of highly transparent workpieces due to low signal-to-noise ratios and the need for extensive recalibration when measuring multiple locations, leading to slow and inaccurate results.
Innovation Solution
A system that uses multiple reflections of electromagnetic radiation through a workpiece, combined with detectors and processors, to enhance signal strength and sensitivity, allowing for faster and more accurate determination of optical characteristics and surface features.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If traditional spectrometers are used to measure highly transparent workpieces, then the measurement process can be performed, but the measurement precision deteriorates due to low signal-to-noise ratios
Solution Approach 1:
The patent employs multiple reflections of electromagnetic radiation through the workpiece, creating periodic interactions between the radiation and the material. This periodic action through multiple passes increases the effective path length and enhances the signal strength relative to noise, thereby improving measurement precision for highly transparent materials
Solution Approach 2:
The patent introduces an intermediary optical cavity or resonant structure that mediates the interaction between the electromagnetic radiation and the workpiece. This intermediary enhances the coupling of radiation with the material, improving signal detection sensitivity and measurement reliability for transparent samples
2Measurement precision
If multiple locations on the workpiece are measured using traditional systems, then comprehensive optical characteristics can be obtained, but the productivity deteriorates due to extensive recalibration requirements
Solution Approach 1:
The patent creates a universal measurement system where the optical cavity and detection apparatus can measure multiple locations and various optical characteristics without requiring recalibration. The system is designed to handle different measurement positions and parameters through a single standardized configuration, enabling comprehensive data collection across the workpiece surface while maintaining high productivity
Solution Approach 2:
The patent enables continuous measurement across multiple locations by eliminating the need for recalibration between positions. The optical system maintains stable reference conditions throughout the measurement process, allowing uninterrupted data collection across the entire workpiece surface, thereby significantly improving measurement throughput
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system provides fast, simple, and stable measurements of high-transparency workpieces, enabling efficient quality control and calibration in high-volume manufacturing environments.
Implementation Method 1
providing emission of one or more electromagnetic radiation signals to the silicon carbide semiconductor workpiece such that the one or more electromagnetic radiation signals are at least partially transmitted through the silicon carbide semiconductor workpiece and internally reflected within the silicon carbide semiconductor workpiece
Data Source
AI summary
Systems and methods for determining optical properties of a workpiece (e.g., silicon carbide workpiece). In some examples, the method includes providing emission of one or more electromagnetic radiation signals to the silicon carbide semiconductor workpiece such that the one or more electromagnetic radiation signals are at least partially transmitted through the silicon carbide semiconductor workpiece and internally reflected within the silicon carbide semiconductor workpiece. In some implementations, the example method includes receiving the one or more electromagnetic radiation signals at one or more detectors.