SiC Semiconductor Element With Schottky Electrode for High-Speed Switching

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Solution Overview

Problem

Conventional semiconductor elements used in inverter circuits face challenges with high-speed switching and energy loss due to current concentration from counter electromotive voltage, leading to potential breakdown and reduced fabrication yield.

Innovation Solution

A semiconductor element with a schottky electrode and field effect transistors made from wide band-gap semiconductors, where the schottky electrode is strategically placed to form a schottky junction with the drift region, and a guard ring is used to manage electric field concentration, allowing for high-speed switching and reduced energy loss.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If conventional semiconductor elements (IGBT, silicon MOSFET) are used for switching, then the device can operate with established technology, but the response speed is limited and switching loss increases

Engineering Contradiction:
Improveswitching speedVSAvoidswitching loss
Core Design Contradiction:
SpeedVSLoss of energy

Solution Approach 1:

The patent changes the fundamental material parameter by using wide band-gap semiconductor (SiC) instead of conventional silicon, enabling higher switching speeds and reduced switching loss while maintaining device reliability

Inventive Principle:
Principle #35Parameter changes

2Loss of energy

If higher switching speed is achieved using wide band-gap semiconductors, then switching loss is reduced, but current concentration from counter electromotive voltage causes breakdown and reduces fabrication yield

Engineering Contradiction:
Improveswitching lossVSAvoidbreakdown resistance
Core Design Contradiction:
Loss of energyVSReliability

Solution Approach 1:

The schottky electrode acts as an intermediary element that provides a low-impedance path for counter electromotive voltage current, preventing current concentration and breakdown in the semiconductor substrate while enabling high-speed switching operations

Inventive Principle:
Principle #24Intermediary (Mediator)

3Reliability

If the schottky electrode area is increased to reduce current concentration, then breakdown resistance improves, but the area ratio of transistor cells to total element area decreases

Engineering Contradiction:
Improvebreakdown resistanceVSAvoidfabrication yield
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The patent applies local quality by positioning the schottky electrode specifically at the periphery of the semiconductor element where current concentration occurs, rather than uniformly distributing it, thus maintaining high breakdown resistance while preserving transistor cell area ratio and fabrication yield

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enables high-speed switching operations while reducing energy losses and improving resistance to current concentration, thereby preventing breakdown and enhancing the semiconductor element's reliability and efficiency in inverter circuits.

Implementation Method 1

a schottky electrode which is disposed on the upper surface of the drift region so as to form a schottky junction with the upper surface of the drift region

Methodology Applied
Scientific EffectSchottky junction:

Implementation Method 2

a semiconductor layer made of a wide band-gap semiconductor

Methodology Applied
Scientific EffectWide band-gap semiconductor property:

Implementation Method 3

a guard ring is used to manage electric field concentration, allowing for high-speed switching and reduced energy loss

Methodology Applied
Scientific EffectElectric field concentration: Electric Field

Data Source

PatentUS7791308B2Semiconductor element and electrical apparatus
Publication Date: 2010.09.07 PANASONIC HOLDINGS CORP
  • US7791308B2 patent drawing
  • US7791308B2 patent drawing
  • US7791308B2 patent drawing

AI summary

A semiconductor element (20) of the present invention includes a plurality of field effect transistors (90) and a schottky electrode (9a), and the schottky electrode (9a) is formed along an outer periphery of a region where the plurality of field effect transistors (90) are formed.