SiC Sintered Body Uniform Resistivity via Nitrogen Doping

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Solution Overview

Problem

SiC sintered bodies produced by existing methods exhibit varying volume resistivity depending on measurement position, leading to uneven current flow and temperature distribution in heating elements, and require improved density.

Innovation Solution

A SiC sintered body with a relative density of 98% or higher, containing nitrogen atoms, is produced by mixing SiC powders with Si3N4 particles and sintering at temperatures below 2400°C, ensuring a consistent volume resistivity ratio and high density.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional sintering methods are used to produce SiC sintered bodies, then the production process is simple, but the volume resistivity varies greatly depending on measurement position, leading to uneven current flow and temperature distribution

Engineering Contradiction:
Improvevolume resistivity uniformityVSAvoidproduction process complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The invention changes the chemical composition parameter by adding nitrogen (0.01-5 mass%) to the SiC sintered body. This parameter change achieves uniform volume resistivity distribution while maintaining a relatively simple sintering process at 2000-2400°C, resolving the contradiction between manufacturing precision and process complexity

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The invention creates a composite material system by combining SiC with nitrogen-containing compounds (such as Si3N4, BN, or B4C) as sintering aids. This composite approach achieves uniform electrical properties and high density (95% or more of theoretical density) while keeping the sintering process manageable

Inventive Principle:
Principle #40Composite materials

2Manufacturing precision

If sintering aids are added to improve density and conductivity, then the specific resistance value can be controlled, but the volume resistivity becomes uneven and varies by measurement position

Engineering Contradiction:
Improvevolume resistivity uniformityVSAvoiddensity control
Core Design Contradiction:
Manufacturing precisionVSEase of manufacture

Solution Approach 1:

The invention optimizes the nitrogen content parameter to 0.01-5 mass% and controls the sintering temperature range at 2000-2400°C. This parameter optimization achieves both high density (95% or more of theoretical density) and uniform volume resistivity distribution, resolving the contradiction between manufacturing precision and ease of manufacture

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The invention ensures uniform distribution of nitrogen-containing sintering aids throughout the SiC matrix, creating local homogeneity that results in consistent volume resistivity across different measurement positions while achieving high overall density

Inventive Principle:
Principle #3Local quality

3Manufacturing precision

If high sintering temperature is used to improve density, then the relative density increases, but the production cost and energy consumption increase

Engineering Contradiction:
Improverelative densityVSAvoidsintering energy consumption
Core Design Contradiction:
Manufacturing precisionVSUse of energy by stationary object

Solution Approach 1:

The invention utilizes nitrogen-containing sintering aids that enable effective sintering at 2000-2400°C, achieving high density (95% or more of theoretical density) at relatively lower temperatures compared to conventional methods. This reduces sintering energy consumption while maintaining high manufacturing precision

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

Nitrogen-containing compounds act as intermediary sintering aids that facilitate densification at lower temperatures. These intermediaries enable the SiC particles to bond effectively at 2000-2400°C, achieving high density without requiring excessive energy input

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The method results in a SiC sintered body with consistent volume resistivity and high density, enabling uniform temperature control in heating elements and improved mechanical strength.

Implementation Method 1

a SiC ultrafine powder having an average particle diameter of lower than 0.1 μm and synthesized in a gas phase by plasma CVD

Methodology Applied
Scientific EffectPlasma CVD: Plasma Enhanced Chemical Vapour Deposition

Implementation Method 2

the SiC sintered body exhibits conductivity and is therefore widely used as a resistance heating element

Methodology Applied
Scientific EffectJoule heating: Joule Heating

Data Source

PatentUS10703677B2SiC sintered body, heater and method for producing SiC sintered body
Publication Date: 2020.07.07 SUMITOMO OSAKA CEMENT CO LTD

AI summary

Provided is a SiC sintered body which contains nitrogen atoms, wherein a ratio Rmax/Rave of a maximum volume resistivity Rmax of the sintered body to an average volume resistivity Rave of the sintered body is 1.5 or lower; a ratio Rmin/Rave of a minimum volume resistivity Rmin of the sintered body to the average volume resistivity Rave is 0.7 or higher; and a relative density of the sintered body is 98% or higher.