SiC TVS Diode Structure for High Voltage Protection

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Solution Overview

Problem

Silicon-based TVS diodes face limitations in high-temperature operation due to high leakage currents and reduced peak power handling, requiring multiple diodes in series for higher breakdown voltages, which increases costs and reduces peak power ratings.

Innovation Solution

The development of Silicon Carbide (SiC) TVS diodes with a P-N diode structure formed within a SiC substrate, featuring an N-type region, a P-type region, and an implanted N-type layer, allowing for higher breakdown voltages and peak power ratings without the need for multiple diodes in series.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If multiple Si TVS diodes are connected in series to achieve higher breakdown voltages, then the breakdown voltage requirement is met, but the peak power rating is reduced and the circuit protection cost increases

Engineering Contradiction:
Improvebreakdown voltageVSAvoidpeak power rating
Core Design Contradiction:
TemperatureVSPower

Solution Approach 1:

The patent combines multiple P-N junctions in parallel within a single SiC TVS diode structure. The first P-N junction and second P-N junction share a common N-type substrate, creating a unified device that handles high voltage through multiple junctions working together rather than requiring series connections of separate diodes.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent utilizes Silicon Carbide (SiC) material with wide bandgap properties to construct the TVS diode. SiC enables the device to achieve high breakdown voltage (600V or higher) while maintaining high peak power rating, overcoming the limitations of conventional silicon-based TVS diodes that require series connections for high voltage applications.

Inventive Principle:
Principle #40Composite materials

2Device complexity

If Si TVS diodes are used for high breakdown voltage applications, then the device structure is simple, but multiple diodes in series are required which increases device complexity

Engineering Contradiction:
Improvediode structureVSAvoidbreakdown voltage
Core Design Contradiction:
Device complexityVSTemperature

Solution Approach 1:

The patent combines multiple P-N junctions in parallel within a single SiC TVS diode structure. The first P-N junction and second P-N junction share a common N-type substrate, creating a unified device that handles high voltage through multiple junctions working together rather than requiring series connections of separate diodes.

Inventive Principle:
Principle #5Merging (Combining)

3Temperature

If Si TVS diodes operate at high ambient temperatures, then the application requirement is met, but leakage current increases and peak power handling capability is reduced

Engineering Contradiction:
Improveoperating temperatureVSAvoidleakage current
Core Design Contradiction:
TemperatureVSLoss of energy

Solution Approach 1:

The patent changes the material parameter from conventional silicon to Silicon Carbide (SiC), which has a wider bandgap. This material parameter change fundamentally alters the temperature-dependent behavior, enabling low leakage current operation at high temperatures where silicon-based TVS diodes fail.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

SiC TVS diodes offer improved high-temperature operation with reduced leakage currents and increased peak power handling, enabling higher breakdown voltages up to 600V without the need for series connections, thus enhancing reliability and cost-effectiveness.

Implementation Method 1

an implanted N-type layer, the implanted N-type layer being disposed between the P-type region and the N-type region

Methodology Applied
Scientific EffectIon Implantation: Ion Implantation

Implementation Method 2

A highly doped P-type region may then be formed on the N-type epilayer, where a P/N junction, defining properties of the TVS diode, forms between the N-type epilayer and the P-type region

Methodology Applied
Scientific EffectP-N Junction:

Implementation Method 3

due to the large bandgap of the SiC (3.26eV vs. 1.1eV for Si), SiC has a lower intrinsic carrier concentration compared to Si

Methodology Applied
Scientific EffectBandgap Effect:

Implementation Method 4

During a voltage transient, the TVS diode operation is triggered to safely discharge the surge current

Methodology Applied
Scientific EffectAvalanche Breakdown: Avalanche Breakdown

Data Source

PatentEP4075517A1Stucture and method for sic based protection device
Publication Date: 2022.10.19 MONOLITH SEMICONDUCTOR INC
  • EP4075517A1 patent drawingFigure 1~2
  • EP4075517A1 patent drawingFigure 3~4
  • EP4075517A1 patent drawingFigure 5~6

AI summary

A device may include a P-N diode, formed within a SiC substrate. The device may include an N-type region formed within the SiC substrate, a P-type region, formed in an upper portion of the N-type region; and an implanted N-type layer, the implanted N-type layer being disposed between the P-type region and the N-type region.