Sidewall Image Transfer Routing for IC Layouts
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Solution Overview
Problem
Conventional sidewall image transfer methods in electronic design automation for integrated circuits face limitations, particularly with closed paths that cross an odd number of sidewalls, leading to manufacturing infeasibility and increased costs, due to the fundamental resolution limits of lithography technology and the inability to form certain patterns like T-junctions.
Innovation Solution
A method and apparatus for routing electronic designs using sidewall image transfer that ensures successful manufacturing by constraining the layout to allow only two-mask sidewall image transfer, preventing configurations that cannot be manufactured, and employing algorithms to resolve conflicts by changing wire colors and re-routing wires to avoid odd cycles and conflicts.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If conventional sidewall image transfer methods are used for routing, then manufacturing process is simplified, but layouts with closed paths crossing odd number of sidewalls cannot be manufactured
Solution Approach 1:
The router performs preliminary actions by detecting closed paths and odd cycles during the routing process, before manufacturing occurs. It proactively identifies and resolves coloring conflicts by changing wire colors or re-routing wires, ensuring the layout is manufacturable with sidewall image transfer before the actual manufacturing process begins.
Solution Approach 2:
The system implements feedback by continuously monitoring the routing configuration for closed paths and odd cycles. When a conflict is detected, the router provides feedback by automatically adjusting wire colors or re-routing connections, creating a closed-loop control system that ensures manufacturing compatibility.
2Adaptability or versatility
If routing is performed without constraints, then design flexibility is maximized, but manufacturing feasibility is compromised
Solution Approach 1:
The router acts as an intermediary between design flexibility and manufacturing feasibility. It introduces constraints and rules that mediate between the desired routing configuration and the manufacturing requirements, automatically adjusting the design to ensure compatibility with sidewall image transfer processes while maintaining design intent.
Solution Approach 2:
The system changes parameters by adjusting wire colors (assigning different colors to different sides of wires) and modifying routing paths when conflicts are detected. These parameter changes transform an infeasible routing configuration into a manufacturable one while preserving the overall design functionality.
3Reliability
If additional routing constraints are imposed for sidewall image transfer compatibility, then manufacturing reliability improves, but routing complexity increases
Solution Approach 1:
The router performs self-service by automatically detecting and resolving its own conflicts without external intervention. It autonomously identifies closed paths, determines odd cycles, changes wire colors, and re-routes connections as needed, making the routing process self-correcting and reducing the need for manual intervention or complex external control systems.
Data Source
AI summary
Disclosed is a method, apparatus, and program product for routing an electronic design using sidewall image transfer that is correct by construction. The layout is routed by construction to allow successful manufacturing with sidewall image transfer, since the router will not allow a routing configuration in the layout that cannot be successfully manufactured with a two-mask sidewall image transfer. A layout is produced that can be manufactured by a two-mask sidewall image transfer method. In one approach, interconnections can be in arbitrary directions. In another approach, interconnections follow grid lines in x and y-directions.