Sidewall Injection Regions in Optoelectronic Semiconductor Chips

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Solution Overview

Problem

The internal quantum efficiency of nitride-based LEDs is limited by the mobility of holes, which is hindered by the barrier height between quantum wells and barrier layers, and further inhibited by polarization charges, leading to reduced efficiency due to non-radiative recombination at the side surfaces.

Innovation Solution

The semiconductor chip incorporates injection regions at its side surfaces, doped to match the first layer's conductivity type, allowing charge carriers to be injected directly into the active layer, thereby reducing parasitic surface effects and enhancing quantum efficiency by ensuring uniform injection into quantum wells.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If the semiconductor layer sequence uses standard doping without injection regions, then the structure is simpler and manufacturing is easier, but charge carrier injection into the active layer is inefficient and non-radiative recombination increases

Engineering Contradiction:
Improveease of manufactureVSAvoidquantum efficiency
Core Design Contradiction:
Ease of manufactureVSProductivity

Solution Approach 1:

The patent applies local quality by creating injection regions with specific doping characteristics (matching the first layer's conductivity type) at particular locations (side surfaces penetrating into the active layer) while leaving other regions with standard doping. This localized modification improves charge carrier injection efficiency without requiring complete restructuring of the entire semiconductor layer sequence, thus balancing manufacturing complexity with performance enhancement.

Inventive Principle:
Principle #3Local quality

2Productivity

If injection regions are added to improve charge carrier injection, then quantum efficiency increases, but device structure and manufacturing process become more complex

Engineering Contradiction:
Improvequantum efficiencyVSAvoiddevice complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The injection regions are formed during the semiconductor layer sequence growth process itself, rather than as a separate post-processing step. By incorporating the doping structure into the initial layer formation, the patent achieves improved charge carrier injection without adding significant manufacturing steps, thus limiting the increase in device complexity.

Inventive Principle:
Principle #10Preliminary action

3Volume of moving object

If the semiconductor chip dimensions are reduced for miniaturization, then device size decreases, but non-radiative recombination at side surfaces increases and efficiency decreases

Engineering Contradiction:
Improvedevice sizeVSAvoidlight efficiency
Core Design Contradiction:
Volume of moving objectVSProductivity

Solution Approach 1:

The injection regions are strategically positioned at the side surfaces where non-radiative recombination occurs most frequently. By providing enhanced charge carrier injection pathways specifically at these problematic locations, the patent counteracts the increased surface-to-volume ratio effects in miniaturized devices, allowing small chips to maintain high efficiency despite their reduced dimensions.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach increases the quantum efficiency of the semiconductor chip by improving charge carrier injection and reducing non-radiative recombination, particularly in devices with small dimensions, while maintaining high light efficiency and material quality.

Implementation Method 1

the injection region is configured to inject charge carriers directly into the active layer

Methodology Applied
Scientific EffectCharge carrier injection: Conduction (electrical)

Implementation Method 2

The active layer is configured to emit or absorb electromagnetic radiation during intended operation and then to convert it, for example, into an electronic or optical signal

Methodology Applied
Scientific EffectPhotoluminescence: Photoluminescence

Implementation Method 3

The first layer comprises a first conductivity type and the second layer comprises a second conductivity type

Methodology Applied
Scientific EffectElectrical conduction: Conduction (electrical)

Data Source

PatentUS12100782B2Optoelectronic semiconductor chip and method for producing an optoelectronic semiconductor chip
Publication Date: 2024.09.24 OSRAM OPTO SEMICON GMBH & CO OHG
  • US12100782B2 patent drawing
  • US12100782B2 patent drawing
  • US12100782B2 patent drawing

AI summary

In an embodiment an optoelectronic semiconductor chip includes a semiconductor layer sequence with a first layer, a second layer and an active layer arranged between the first layer and the second layer, the semiconductor layer sequence having at least one injection region, wherein the first layer includes a first conductivity type, wherein the second layer includes a second conductivity type, wherein the semiconductor layer sequence includes the first conductivity type within the entire injection region, wherein the injection region, starting from the first layer, at least partially penetrates the active layer, wherein side surfaces of the semiconductor layer sequence are formed at least in places by the injection region, and wherein the injection region is configured to inject charge carriers directly into the active layer.