Sidewall Thermal Coupling for Vertically Stacked Semiconductor Packages

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Solution Overview

Problem

The exponential increase in power dissipation and thermal management challenges in high-density, vertically stacked semiconductor devices, particularly in high-performance computing and AI applications, are not adequately addressed by conventional backside cooling methods, leading to excessive operating temperatures and thermal sensitivity issues in memory devices.

Innovation Solution

A semiconductor device package design that incorporates a thermal element thermally coupled to the lateral surfaces of a stack structure, providing additional heat dissipation pathways through high thermal conductivity materials and structures, supplementing or replacing traditional one-sided cooling approaches.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If conventional backside cooling methods are used, then the structure is simple and easy to manufacture, but the thermal management is insufficient leading to excessive operating temperatures

Engineering Contradiction:
Improveoperating temperatureVSAvoidcooling structure complexity
Core Design Contradiction:
TemperatureVSDevice complexity

Solution Approach 1:

The patent transitions from conventional one-dimensional backside cooling to multi-dimensional thermal management by coupling thermal elements to lateral surfaces of the stack structure, enabling heat dissipation in additional spatial dimensions and significantly improving thermal management effectiveness

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The thermal elements are integrated within the package structure itself, with lateral thermal elements nested around the stack structure and backside thermal elements integrated into the substrate, creating a compact nested thermal management system that improves cooling without proportionally increasing external dimensions

Inventive Principle:
Principle #7Nested doll (Nesting)

2Quantity of substance

If more dies are vertically stacked in HBMs, then the memory capacity increases, but the thermal sensitivity issues worsen due to increased operating temperatures

Engineering Contradiction:
Improvememory capacityVSAvoidthermal sensitivity
Core Design Contradiction:
Quantity of substanceVSReliability

Solution Approach 1:

The patent segments the thermal management function into multiple independent thermal elements positioned at different locations (lateral surfaces and backside) of the stack structure, allowing distributed heat dissipation that protects individual dies from excessive temperature buildup even as stack height and capacity increase

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Thermal elements act as intermediary structures between the heat-generating dies and the external environment, providing dedicated thermal pathways that mediate heat transfer and maintain reliable operating temperatures for memory devices as capacity scales

Inventive Principle:
Principle #24Intermediary (Mediator)

3Power

If the number of GPUs and HBMs is increased for higher performance, then the computational power increases, but the thermal management challenges worsen

Engineering Contradiction:
Improvecomputational powerVSAvoidheat dissipation challenge
Core Design Contradiction:
PowerVSTemperature

Solution Approach 1:

By adding lateral thermal coupling dimensions in addition to backside cooling, the patent creates multi-path thermal management that can handle the proportionally increased heat loads from higher computational power configurations without linearly increasing cooling system complexity

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enhances thermal management by efficiently dissipating heat from internal and heat-sensitive dies, maintaining optimal operating temperatures and improving performance and reliability of the semiconductor device package.

Implementation Method 1

A first thermal element is disposed to surround lateral surfaces of the stack structure and is thermally coupled to at least a lateral surface of at least one of the pluralities of electronic components

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentUS20260060072A1Semiconductor device package with sidewall-coupled thermal element and method of manufacturing the same
Publication Date: 2026.02.26 ETRON TECH INC
  • US20260060072A1 patent drawing
  • US20260060072A1 patent drawing
  • US20260060072A1 patent drawing

AI summary

A semiconductor device package is provided. The semiconductor device package includes a stack structure comprising a plurality of electronic components vertically stacked relative to each other. Each of the plurality of electronic components is configured to provide electrical connectivity in a vertical direction. A first thermal element surrounds lateral surfaces of the stack structure and is thermally coupled to a lateral surface of at least one of the electronic components, thereby enhancing lateral heat dissipation efficiency of the stack structure.