Siegbahn Vacuum Pump Groove Layout for Higher Compression
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional turbomolecular pumps, such as the Siegbahn type, face inefficiencies in compression ratio due to loss of kinetic momentum when gas flows between stages, leading to complex rotor and stator disc designs that increase machining costs.
Innovation Solution
The design incorporates stator discs with ridge portions that allow for partial alignment of helical groove ends and starts on the same straight line, reducing complexity and maintaining momentum transfer between stages.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional vacuum pump with a rotor having radial grooves is used, then the pump can achieve vacuum operation, but the rotor generates vibration and noise during operation
Solution Approach 1:
The rotor is divided into multiple segments, each with its own groove structure. This segmentation allows the rotor to maintain vacuum sealing capability while reducing vibration and noise through distributed load paths and reduced harmonic resonance.
Solution Approach 2:
Different regions of the rotor have different groove configurations. The groove depth, width, and spacing vary locally to optimize both vacuum sealing performance and vibration characteristics in different areas of the rotor.
2Reliability
If the rotor grooves are designed to seal effectively against the stator, then vacuum performance is improved, but the rotor becomes more prone to vibration and noise
Solution Approach 1:
The rotor grooves are designed with dynamic characteristics that allow them to adapt to operational conditions. The groove geometry is optimized to maintain effective sealing while allowing controlled movement that reduces vibration and noise during vacuum operation.
3Device complexity
If existing rotor groove designs are used, then the pump structure is simple, but the rotor generates harmful vibrations and noise
Solution Approach 1:
Multiple grooves are nested within the rotor structure, with each groove containing smaller features or elements that further reduce vibration and noise while maintaining sealing effectiveness. This nested design increases functionality without proportionally increasing overall complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances compression efficiency while minimizing machining costs by simplifying the design of rotor and stator discs, ensuring effective kinetic momentum transfer.
Implementation Method 1
a rotor (20) that rotates inside the stator (10) and has grooves (21) formed in a radial direction
Implementation Method 2
a vacuum pump for creating and adjusting a vacuum in a vacuum chamber
Data Source
Figure 1
Figure 2(a)~2(b)
Figure 3(a)~3(b)
AI summary
Provided is a vacuum pump regarding which compression can be improved at low costs. Included is a plurality of Siegbahn exhaust mechanisms in which a helical groove is provided to a stator disc. The Siegbahn exhaust mechanisms are provided on both faces of an upstream side and a downstream side of the stator disc. An end portion of the helical groove provided on the upstream side and a start portion of the helical groove provided on the downstream side are situated at least partially overlapping in a circumferential direction. A width of a channel of a switchback portion of the upstream side and the downstream side is equivalent or less than a depth of a channel of the Siegbahn exhaust mechanisms.