Siegbahn Vacuum Pump Projecting Portions Flow Continuity
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Solution Overview
Problem
Existing Siegbahn type molecular pumps face inefficiencies in exhaust efficiency due to momentum loss in inwardly bent flow paths with no exhausting function, leading to reduced compression ratios and increased costs from larger flow path sizes and increased number of stages.
Innovation Solution
The design incorporates projecting portions on stationary disks to maintain continuity of exhaust flow between upstream and downstream regions, ensuring momentum is not lost and allowing for smaller flow path sizes without reducing compression performance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If gas molecules are transported through inwardly bent flow paths in related-art Siegbahn type molecular pumps, then the pump structure can be simplified, but momentum is lost in the space between rotary cylinder and stationary disk resulting in reduced exhaust efficiency
Solution Approach 1:
The patent extracts the exhaust function from the inwardly bent flow path space by introducing a separate exhaust conduit that directly connects the upstream and downstream regions. This removes the harmful space where momentum was lost while preserving the simplified pump structure.
Solution Approach 2:
The exhaust conduit acts as an intermediary element that bridges the upstream and downstream regions, providing a dedicated pathway for gas molecules to maintain their momentum while transitioning between stages. This mediator prevents the momentum loss that occurred in the original inwardly bent flow path design.
2Loss of substance
If the flow path size is reduced to decrease pump size, then manufacturing costs and material usage decrease, but exhaust efficiency deteriorates due to momentum loss
Solution Approach 1:
The patent segments the flow path into distinct functional zones: the inwardly bent flow path for structural simplicity and the separate exhaust conduit for momentum preservation. This segmentation allows each zone to be optimized independently, enabling reduced flow path size without sacrificing exhaust efficiency.
Solution Approach 2:
The exhaust conduit ensures continuous and efficient exhaust action by providing a direct, dedicated pathway for gas molecules. This continuity maintains momentum throughout the exhaust process, allowing the pump to achieve high exhaust efficiency even with reduced flow path dimensions and material usage.
3Reliability
If the number of stages is increased to improve compression ratio, then compression performance improves, but device complexity and manufacturing costs increase
Solution Approach 1:
The patent merges the exhaust functions of multiple stages into a unified exhaust conduit system. By combining the exhaust pathways and using common exhaust conduits across stages, the pump achieves high compression ratios without proportionally increasing device complexity or manufacturing costs.
Solution Approach 2:
The exhaust conduit is designed with multi-functionality, serving as the exhaust pathway for multiple stages simultaneously. This universal component performs the exhaust function across different stages, reducing the need for separate exhaust systems for each stage and thereby lowering overall device complexity while maintaining high compression performance.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances exhaust efficiency by minimizing momentum loss and reducing the size and material costs of the pump, while maintaining high compression ratios.
Implementation Method 1
the rotary disk gives a momentum in a direction tangential to the rotary disk (i.e., direction tangential to the rotating direction of the rotary disk) to gas molecules that have dispersedly entered the spiral groove flow paths
Implementation Method 2
gas is sucked in through the inlet port by the interaction of a rotor vane (rotary disk) and a stator vane (stationary disk)
Data Source
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AI summary
Provided is a vacuum pump component and a Siegbahn type exhaust mechanism which effectively connect conduits each having an exhausting function, and a compound vacuum pump which effectively connects conduits each having an exhausting function. A vacuum pump in embodiments of the present invention is a compound vacuum pump including a vacuum pump component and a Siegbahn type exhaust mechanism which effectively connect conduits each having an exhausting function. A stationary disk is formed with a spiral groove (helical groove) having a ridge portion and a valley part and has a projecting (protruding) portion on both or either one of an inner-diameter portion of the stationary disk which faces a rotary cylinder (rotator cylinder-shaped portion) and an inner-diameter side of a stationary cylinder disposed on an outer peripheral side of the stationary disk. A rotary disk is formed with a spiral groove having a ridge portion and a valley part and has a projecting (protruding) portion on both or either one of an outer-diameter portion of a rotary cylinder disposed on an inner peripheral side of the rotary disk and an outer-diameter portion of the rotary disk which faces a spacer.