SiGe Light-Receiving Element Dark Current Suppression

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Solution Overview

Problem

Germanium (Ge) or SiGe substrates in light-receiving elements for ranging modules using indirect Time of Flight systems face increased dark current due to defects, which hampers quantum efficiency improvement.

Innovation Solution

A light-receiving element with a pixel array region featuring a matrix pattern of SiGe or Ge photoelectric conversion regions and an AD converting portion in pixel units, which reduces dark current while enhancing quantum efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If Ge or SiGe is used as semiconductor substrate to improve quantum efficiency of infrared light, then quantum efficiency is improved, but dark current increases due to defects in bulk or Si/Ge layer

Engineering Contradiction:
Improvequantum efficiencyVSAvoiddark current
Core Design Contradiction:
Measurement precisionVSObject-generated harmful factors

Solution Approach 1:

The pixel array is divided into first pixel regions with Ge/SiGe photoelectric conversion regions and second pixel regions with Si photoelectric conversion regions. This segmentation allows the system to utilize both materials: Ge/SiGe for high quantum efficiency in specific areas and Si for low dark current in other areas, thereby resolving the contradiction between improved quantum efficiency and suppressed dark current.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the pixel array are assigned different material compositions tailored to specific functional requirements. The first pixel regions use Ge or SiGe for enhanced infrared light absorption and quantum efficiency, while the second pixel regions use Si for lower dark current characteristics. This local differentiation of material quality optimizes overall system performance by addressing both contradictory requirements in their respective suitable locations.

Inventive Principle:
Principle #3Local quality

2Measurement precision

If Ge or SiGe is used as semiconductor substrate, then infrared light detection capability is improved, but sensor sensitivity declines due to increased dark current

Engineering Contradiction:
Improveinfrared light detection capabilityVSAvoidsensor sensitivity
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The pixel array is segmented into specialized regions: first pixel regions using Ge/SiGe for superior infrared detection capability and second pixel regions using Si for maintained sensor sensitivity. This spatial segmentation enables the system to simultaneously achieve enhanced infrared detection where needed while preserving sensitivity through regions with lower dark current, thus resolving the contradiction between detection capability and sensitivity.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different material compositions are applied to different regions based on their specific detection requirements. The Ge/SiGe regions provide enhanced infrared absorption and detection capability, while the Si regions maintain lower dark current levels that preserve overall sensor sensitivity. This local optimization of material quality allows the system to achieve both improved infrared detection and maintained sensitivity.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively suppresses dark current and improves quantum efficiency, enhancing the sensitivity and performance of light-receiving elements for infrared light detection.

Implementation Method 1

a light-receiving element with improved light-receiving characteristics due to adopting backside illumination is proposed... a pixel array region where pixels in which at least a photoelectric conversion region is formed of an SiGe region or a Ge region are arrayed

Methodology Applied
Scientific EffectPhotoelectric conversion: Photoelectric Effect

Data Source

PatentUS20230261029A1Light-receiving element and manufacturing method thereof, and electronic device
Publication Date: 2023.08.17 SONY SEMICON SOLUTIONS CORP
  • US20230261029A1 patent drawing
  • US20230261029A1 patent drawing
  • US20230261029A1 patent drawing

AI summary

The present technique relates to a light-receiving element that enables a dark current to be suppressed while improving quantum efficiency using Ge or SiGe, a method of manufacturing the light-receiving element, and an electronic device. The light-receiving element includes: a pixel array region where pixels in which at least a photoelectric conversion region is formed of a SiGe region or a Ge region are arrayed in a matrix pattern; and an AD converting portion provided in pixel units of one or more pixels. The present technique can be applied to, for example, a ranging module that measures a distance to a subject, and the like.