SiGe MQW Electroabsorption Modulator Coupling on SOI

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Solution Overview

Problem

Designing high-speed SiGe quantum confined Stark effect (QCSE) electroabsorption modulators (EAMs) operating at O-band wavelength on a 3µm SOI platform is challenging due to limitations in germanium material properties, including the design of the SiGe multiple quantum well epitaxy stack, coupling structure, and achieving a 2V driving voltage compatible with CMOS drivers.

Innovation Solution

A SiGe multiple quantum well (MQW) epitaxial stack is designed with a transit buffer layer, buffer layer, and taper structure to facilitate low-loss coupling from the 3µm SOI waveguide to the SiGe MQW waveguide, incorporating P-type and N-type doped layers to achieve a 2V driving voltage and high modulation speed, while minimizing parasitic capacitance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If a direct coupling structure is used between the 3µm SOI waveguide and the SiGe MQW waveguide, then the device complexity is reduced, but the coupling loss increases due to large waveguide dimension mismatch and refractive index contrast

Engineering Contradiction:
Improvecoupling structure complexityVSAvoidoptical coupling loss
Core Design Contradiction:
Device complexityVSLoss of energy

Solution Approach 1:

The coupling structure is divided into three distinct segments: a first coupling region with a first mode converter that gradually transforms the optical mode from the SOI waveguide, a second coupling region with a second mode converter that further transforms the mode to match the SiGe MQW waveguide, and an intermediate buffer region. This segmentation allows the complex mode transformation to be achieved in steps rather than directly, reducing coupling loss while maintaining manageable device complexity.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

An intermediate buffer waveguide region is introduced between the SOI waveguide and the SiGe MQW waveguide. This buffer region acts as an intermediary that facilitates gradual mode transformation and impedance matching between the two dissimilar waveguides, reducing the refractive index contrast effect and minimizing optical coupling loss.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Reliability

If the MQW region thickness is increased to improve modulation depth, then the modulation performance is improved, but the carrier screen effect increases making it difficult to achieve 2V driving voltage with CMOS drivers

Engineering Contradiction:
Improvemodulation depthVSAvoiddriving voltage requirement
Core Design Contradiction:
ReliabilityVSEase of operation

Solution Approach 1:

The patent optimizes the MQW region thickness to a specific range (50-200 nm) and adjusts the germanium composition ratio in the quantum wells to achieve the desired balance. By carefully controlling these parameters, the modulation depth is sufficient while the carrier screen effect is limited, enabling operation at 2V driving voltage compatible with CMOS drivers.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent uses composite SiGe materials with specific germanium compositions in the quantum well and barrier layers. The SiGe quantum confined Stark effect modulator utilizes the unique properties of SiGe alloy materials to achieve both adequate modulation depth and reduced carrier screen effect, enabling low-voltage operation.

Inventive Principle:
Principle #40Composite materials

3Productivity

If the SOI waveguide dimensions are reduced to improve integration density, then the productivity is improved, but the coupling efficiency to the SiGe MQW waveguide decreases due to increased dimension mismatch

Engineering Contradiction:
Improveintegration densityVSAvoidcoupling loss
Core Design Contradiction:
ProductivityVSLoss of energy

Solution Approach 1:

The patent employs dynamic mode converters in both the first and second coupling regions that gradually transform the optical mode dimensions. These mode converters dynamically adjust the mode field distribution along the propagation direction, enabling efficient coupling between waveguides of different dimensions and improving coupling efficiency even when integration density requirements demand smaller waveguide dimensions.

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enables efficient light coupling and modulation at 1.3µm wavelength with low optical loss and high modulation speed, overcoming the limitations of large SOI waveguide dimensions and refractive index contrast, and supporting CMOS compatibility.

Implementation Method 1

SiGe quantum confined Stark effect (QCSE) electroabsorption modulators

Methodology Applied
Scientific EffectQuantum confined Stark effect:

Implementation Method 2

The coupling region has at least one evanescent coupling and one taper structure to couple light between the SOI waveguide and the SiGe MQW waveguide active region

Methodology Applied
Scientific EffectEvanescent coupling:

Implementation Method 3

The taper structure is designed such that it expands the optical mode of the buffer waveguide to the optical mode of the SiGe MQW waveguide with low optical loss

Methodology Applied
Scientific EffectMode expansion:

Implementation Method 4

incorporating P-type and N-type doped layers to achieve a 2V driving voltage and high modulation speed

Methodology Applied
Scientific EffectPIN junction:

Data Source

PatentEP3513246B1Quantum confined stark effect electro absorption modulator on a SOI platform
Publication Date: 2022.06.08 ROCKLEY PHOTONICS LTD
  • EP3513246B1 patent drawingFigure 1
  • EP3513246B1 patent drawingFigure 2A~2B
  • EP3513246B1 patent drawingFigure 3A~3B

AI summary

An electroabsorption modulator. The modulator comprising an SOI waveguide; an active region, the active region comprising a multiple quantum well (MQW) region; and a coupler for coupling the SOI waveguide to the active region. The coupler comprising: a transit waveguide coupling region; a buffer waveguide coupling region; and a taper region; wherein, the transit waveguide coupling region couples light between the SOI waveguide and the buffer waveguide coupling region; and the buffer waveguide coupling region couples light between the transit waveguide region and the active region via the taper region.