Porous SiGe Thermoelectric Optical Sensor for Lower NEP

The patent applies porous materials by forming phononic structures with pores in the thermoelectric conversion material layers. These porous structures reduce thermal conductivity while maintaining electrical conductivity, directly addressing the contradiction between high sensitivity and low thermal conductivity. The pores act as thermal barriers that prevent heat leakage without significantly impeding charge carrier transport.

The patent uses composite materials by combining different materials with complementary properties in the phononic structure. The thermoelectric conversion material is integrated with phononic crystal structures that have specific acoustic and thermal properties, creating a composite system that optimizes both thermal insulation and electrical conduction for improved sensitivity and reduced noise equivalent power.

The patent applies segmentation by dividing the thermoelectric conversion material into multiple discrete layers with phononic structures. Each layer can be independently formed and optimized, allowing complex porous structures to be created through sequential deposition processes. This segmentation enables precise control over pore size, distribution, and morphology while maintaining manufacturability.

The patent replaces traditional mechanical drilling or etching methods for creating pores with vapor-phase deposition techniques. The phononic structures with pores are formed through chemical vapor deposition or atomic layer deposition processes, substituting complex mechanical fabrication with more controllable and scalable vapor-phase methods that reduce manufacturing complexity.