SiGe Waveguide on Low-Index Substrate for Quantum Integration

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Solution Overview

Problem

Existing technologies face challenges in integrating silicon germanium (SiGe)/silicon (Si) optical resonators with quantum bits (qubits) and complementary metal oxide semiconductor (CMOS) devices due to optical leakage concerns, necessitating improved designs for efficient microwave-to-optical conversion on a common substrate.

Innovation Solution

A waveguide structure is developed using a silicon-on-X (SOX) configuration with a lower refractive index substrate, such as sapphire, diamond, or silicon carbide, to integrate SiGe/Si optical resonators with qubits and CMOS devices, reducing optical leakage and enhancing single photon field strength through refractive index contrast, allowing closer electrode placement and improved performance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If SiGe on Si substrate architecture is used for optical resonators, then integration with qubits and CMOS devices is achieved, but optical leakage occurs

Engineering Contradiction:
Improveintegration capabilityVSAvoidoptical leakage
Core Design Contradiction:
Adaptability or versatilityVSLoss of energy

Solution Approach 1:

The patent employs a composite substrate structure combining SiGe layers with a lower-index substrate material (such as SiC, GaN, or sapphire). This composite architecture allows the SiGe optical resonators to benefit from both the integration advantages of silicon-based materials and the optical confinement benefits of the lower-index substrate, thereby reducing optical leakage while maintaining compatibility with qubits and CMOS devices.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The patent introduces a lower refractive index substrate layer specifically at the region where optical leakage occurs, creating a localized optical confinement structure. This local modification allows the rest of the device to maintain its original SiGe on Si architecture for integration, while the specific area benefits from reduced optical leakage due to the refractive index contrast provided by the lower-index substrate.

Inventive Principle:
Principle #3Local quality

2Loss of energy

If refractive index contrast is increased to reduce optical leakage, then radiation loss is reduced, but device complexity increases

Engineering Contradiction:
Improveradiation lossVSAvoidsubstrate structure complexity
Core Design Contradiction:
Loss of energyVSDevice complexity

Solution Approach 1:

The patent modifies the refractive index parameter of the substrate by selecting materials with a lower index than conventional Si substrates (such as SiC, GaN, or sapphire). This parameter change creates a refractive index contrast that reduces optical leakage and radiation loss. The approach is straightforward as it involves material selection rather than complex structural modifications, thereby achieving energy reduction without proportionally increasing device complexity.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enables efficient microwave-to-optical conversion with reduced radiation loss, enabling closer integration of qubits, CMOS devices, and reconfigurable electrical routing, thereby enhancing quantum computing capabilities.

Implementation Method 1

The structured substrates have a silicon-on-X (SOX) configuration, where X is a wafer having a material with i) a lower refractive index than Si

Methodology Applied
Scientific EffectRefractive index contrast: Refraction

Implementation Method 2

The ability to link microwave electrical signals and optical photons for quantum information processing requires efficient conversion between the microwave and optical domains

Methodology Applied
Scientific EffectElectro-optic conversion: Electro-Optic Effects

Data Source

PatentEP3918391B1Waveguide structure for qubit-optical-CMOS integration
Publication Date: 2026.02.25 INTERNATIONAL BUSINESS MACHINE CORPORATION
  • EP3918391B1 patent drawingFigure 1~2
  • EP3918391B1 patent drawingFigure 3~4
  • EP3918391B1 patent drawingFigure 5~6

AI summary

Techniques for the integration of SiGe/Si optical resonators with qubit and CMOS devices using structured substrates are provided. In one aspect, a waveguide structure includes: a wafer; and a waveguide disposed on the wafer, the waveguide having a SiGe core surrounded by Si, wherein the wafer has a lower refractive index than the Si (e.g., sapphire, diamond, Si C, and/or Ga N). A computing device and a method for quantum computing are also provided.