Solid Immersion Lens Housing With Integrated Spring Section
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Solution Overview
Problem
Existing solid immersion lens (SIL) optics systems face challenges in maintaining alignment and accommodating tilt during placement on semiconductor wafers, with issues such as vignetting, friction, and limited angular displacement, which affect imaging resolution and signal collection efficiency.
Innovation Solution
The proposed SIL optics assembly incorporates a SIL housing with an integrated radial spring section for biased support, allowing for adjustable alignment and accommodation of angular displacement, combined with a spacer element and threaded engagement for precise positioning and focusing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If linear springs are disposed at the periphery of the objective housing to bias the SIL housing, then the SIL can be pressed against the device surface, but this causes vignetting effect and limited angular displacement accommodation
Solution Approach 1:
The spring mechanism is extracted from the objective housing and relocated to the SIL housing. This removes the springs from the optical path area, eliminating the vignetting effect while preserving the biasing function that presses the SIL against the device surface.
Solution Approach 2:
The SIL housing is designed with integrated spring sections that provide biased support, allowing the housing to dynamically accommodate angular displacement between the SIL and objective housings. This dynamic capability enables the system to handle slanted landing surfaces without friction or backlash issues.
2Ease of manufacture
If the SIL housing slides relative to the objective housing, then assembly is simplified, but this creates friction, backlash during focusing, and limited centering repeatability
Solution Approach 1:
The housing system is segmented into the objective housing and the SIL housing as separate, independently supportable components. The SIL housing can be removed and replaced without moving the objective housing, allowing precise re-centering and eliminating cumulative tolerance errors from sliding fits.
Solution Approach 2:
The SIL housing is designed with integrated spring sections that provide biased support, allowing the housing to dynamically accommodate angular displacement between the SIL and objective housings. This dynamic capability enables the system to handle slanted landing surfaces without friction or backlash issues.
3Reliability
If multiple springs are used to bias the SIL, then the SIL can be firmly pressed against the device, but this increases device complexity and makes bias uniformity difficult to control
Solution Approach 1:
Multiple spring functions are merged into a single integrated spring section within the SIL housing. This unified structure provides uniform biased support across the SIL perimeter, simplifying the device configuration while maintaining reliable contact between the SIL and device surface.
4Stability of the object's composition
If the SIL housing and objective housing are fixedly attached, then alignment is maintained, but this prevents accommodation of angular displacement and tilt
Solution Approach 1:
The SIL housing is designed with integrated spring sections that provide biased support, allowing the housing to dynamically accommodate angular displacement between the SIL and objective housings. This dynamic capability enables the system to handle slanted landing surfaces without friction or backlash issues.
Solution Approach 2:
The housing system is segmented into the objective housing and the SIL housing as separate, independently supportable components. The SIL housing can be removed and replaced without moving the objective housing, allowing precise re-centering and eliminating cumulative tolerance errors from sliding fits.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enhances alignment stability, reduces reflection losses, and improves repeatable SIL placement, maintaining high numerical aperture and signal collection efficiency while accommodating small angular displacements, thus improving imaging quality and probing accuracy.
Implementation Method 1
a peripheral wall of the SIL housing comprises an integrated spring section adapted to provide a biased support for the SIL
Data Source
AI summary
A solid immersion lens optics assembly, a test station for probing and testing of integrated circuits on a semiconductor wafer, and a method of landing a SIL on an object. The optics assembly comprises an objective lens housing for receiving an objective lens, and a solid immersion lens (SIL) housing for mounting an SIL and adapted for connection to the objective lens housing; wherein a peripheral wall of the SIL housing comprises an integrated spring section adapted to provide a biased support for the SIL.