Silane Organic Layer Adhesion on Precious Metal Surfaces
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Solution Overview
Problem
Current layer structures in chip packages face challenges with adhesion promotion and corrosion barrier functions, particularly on precious metal surfaces where silane coupling is not possible, leading to delamination issues under reliability conditions such as high temperature and thermal cycling.
Innovation Solution
A method involving plasma-treating a metal surface to form nucleophilic groups, followed by depositing a silane-based organic layer that is covalently bonded to these groups, providing both adhesion promotion and corrosion barrier functions, even on precious metals, using atomic layer deposition (ALD) for oxide layer formation and plasma conditioning for surface optimization.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a galvanic process (A2-treatment) is used to grow Cr/Zn-dendrites for adhesion promotion, then both corrosion protection and adhesion function are provided, but the process becomes complicated
Solution Approach 1:
The patent extracts and separates the two functions (adhesion promotion and corrosion protection) into distinct layers. The plasma-treated metal surface provides adhesion promotion through nucleophilic groups, while a separate corrosion barrier layer provides protection against corrosive substances. This eliminates the need for the complicated galvanic dendrite growth process while maintaining both functions.
Solution Approach 2:
The interface structure is segmented into multiple functional layers: a plasma-treated metal surface with nucleophilic groups for adhesion, and a separate corrosion barrier layer. This segmentation allows each layer to be optimized for its specific function, simplifying the overall process compared to the monolithic galvanic dendrite approach.
2Strength
If silane coupling is used for adhesion promotion on metal surfaces, then adhesion is enhanced, but it is not possible on precious metal surfaces leading to delamination
Solution Approach 1:
The patent changes the chemical parameters of the metal surface through plasma treatment, creating nucleophilic groups (such as hydroxyl groups) on the surface. This parameter change enables covalent bonding with silane-based organic layers on precious metal surfaces where traditional silane coupling fails, thereby achieving adhesion enhancement while maintaining versatility across different metal types.
3Reliability
If the interface between encapsulation material and device provides both adhesion and corrosion barrier functions, then reliability is improved, but the process complexity increases
Solution Approach 1:
The patent merges the adhesion promotion function and corrosion barrier function into a integrated interface structure. The plasma-treated metal surface with nucleophilic groups serves as both the adhesion promoter and the base for the corrosion barrier layer, eliminating the need for separate galvanic treatment processes while providing both protection functions simultaneously.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enhances adhesion and corrosion resistance, as demonstrated by increased shear force measurements under various test conditions, including high temperature and thermal cycling, without damaging the layer structure during packaging.
Implementation Method 1
plasma-treating a metal surface with a hydrogen-containing plasma, thereby forming nucleophilic groups over the metal surface
Implementation Method 2
forming an organic layer over the metal surface, wherein the organic layer comprises or consists of silane and is covalently bonded to the nucleophilic groups
Data Source
AI summary
A method of forming a layer structure is provided. The method may include plasma-treating a metal surface with a hydrogen-containing plasma, thereby forming nucleophilic groups over the metal surface, and forming an organic layer over the metal surface, wherein the organic layer comprises silane and is covalently bonded to the nucleophilic groups.