Silane Mono-Layer for Metal-Organic Adhesion

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Solution Overview

Problem

Inadequate adhesion at metal-organic interfaces in electronic devices leads to defects such as delamination and reduced yield, particularly due to thermo-mechanical interfacial forces and surface roughening methods that can affect electrical performance.

Innovation Solution

A method involving the deposition of a mono-layer of specific silane compositions, such as aminosilanes or thiols, on metal surfaces using vapor phase deposition to enhance adhesion with organic materials like ABF, without increasing surface roughness.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If surface roughening methods (etching, plasma ablation) are used to improve adhesion, then adhesion strength is improved, but electrical performance deteriorates and additional cleaning steps are required

Engineering Contradiction:
Improveadhesion strengthVSAvoidelectrical performance
Core Design Contradiction:
StrengthVSReliability

Solution Approach 1:

The invention changes the fundamental approach from mechanical roughening to chemical treatment by applying silane coupling agents. This parameter change allows achieving strong adhesion through chemical bonding rather than mechanical interlocking, thereby maintaining smooth surfaces that preserve electrical performance while eliminating the need for additional cleaning steps

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The silane coupling agent acts as an intermediary substance between the metal surface and the organic dielectric layer. It forms a chemical bridge that strengthens the interface without requiring surface roughening, thus resolving the contradiction between adhesion strength and electrical performance by introducing a mediating chemical layer

Inventive Principle:
Principle #24Intermediary (Mediator)

2Strength

If surface roughening is applied to improve adhesion, then mechanical interlocking is enhanced, but surface roughness increases which affects high-frequency applications

Engineering Contradiction:
Improveadhesion strengthVSAvoidsurface roughness
Core Design Contradiction:
StrengthVSShape

Solution Approach 1:

The invention replaces the mechanical adhesion mechanism (roughening for mechanical interlocking) with a chemical adhesion mechanism (silane coupling agents forming chemical bonds). This substitution allows achieving strong adhesion without increasing surface roughness, thereby maintaining the smooth surface shape required for high-frequency applications

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Strength

If etching/ablation processes are used to roughen surfaces, then adhesion is improved, but debris is generated that requires additional cleaning steps

Engineering Contradiction:
Improveadhesion strengthVSAvoidprocess complexity
Core Design Contradiction:
StrengthVSEase of manufacture

Solution Approach 1:

The silane coupling agent serves as an intermediary that chemically bonds to the metal surface without requiring removal of material. This eliminates the generation of debris that would otherwise require additional cleaning steps, simplifying the manufacturing process while maintaining strong adhesion

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Improves the interfacial adhesion strength of metal-organic interfaces, reducing delamination and reliability issues while maintaining electrical performance, and is effective for both smooth and rough surfaces.

Implementation Method 1

depositing a mono-layer of a selected silane composition on a surface of the metal structure with a vapor of the selected silane composition

Methodology Applied
Scientific EffectVapor phase deposition: Physical Vapour Deposition

Implementation Method 2

depositing a mono-layer of a selected silane composition on a surface of the metal structure... to improve the adhesion of a metal-organic interface

Methodology Applied
Scientific EffectChemical bonding: Chemical Bonding

Data Source

PatentUS20240357749A1Electronic device with improved interfacial adhesion of metal-organic interfaces
Publication Date: 2024.10.24 YIELD ENGINEERING SYSTEMS INC
  • US20240357749A1 patent drawing
  • US20240357749A1 patent drawing
  • US20240357749A1 patent drawing

AI summary

An electronic device having a substrate with a metal structure, a mono-layer coating of a selected silane composition on a surface of the metal structure, and an organic layer on the mono-layer coating, wherein the mono-layer coating improves the interfacial adhesion strength between the metal surface and the organic material.