Silane recovery device and method
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Solution Overview
Problem
Existing methods are inefficient in recovering and recycling silane gas, an unreacted by-product from silane manufacturing facilities, which is critical for semiconductor and battery industries due to impurities like hydrogen and nitrogen.
Innovation Solution
A silane recovery method involving cooling, pressing, and separating mixed fluids to recover liquid silane, with parallel operations for efficient impurity removal and emergency handling, utilizing units like strainers, coolers, and liquid nitrogen for high-purity silane recovery.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multiple distillation columns and molecular sieves are used to purify silane gas, then purification precision is improved, but device complexity increases
Solution Approach 1:
The purification process is divided into multiple sequential stages: first distillation column for removing lighter impurities, second distillation column for removing heavier impurities, and molecular sieve for removing ethylene. Each stage targets specific impurity groups, achieving high purification precision through systematic segmentation of the purification function.
Solution Approach 2:
The patent utilizes changes in physical parameters (boiling points, molecular sizes) to achieve separation. By controlling temperature and pressure conditions in each distillation column and using molecular sieve with specific pore sizes, the system efficiently separates different impurity components from silane gas.
2Manufacturing precision
If multiple distillation columns and molecular sieves are used to purify silane gas, then manufacturing precision is improved, but device complexity increases
Solution Approach 1:
The manufacturing process is segmented into distinct purification stages, each with specific functions. The first distillation column handles lighter impurities, the second handles heavier impurities, and the molecular sieve handles ethylene. This segmentation allows each unit to be optimized for its specific function while maintaining overall manufacturing precision.
Solution Approach 2:
The patent exploits phase transitions (condensation and vaporization) in distillation columns to separate impurities from silane gas. By controlling temperature and pressure to induce phase changes, the system achieves high manufacturing precision in purifying silane while managing device complexity through efficient use of thermal energy.
3Productivity
If conventional silane recovery methods are used, then silane gas can be recovered, but recovery efficiency is low due to impurity presence
Solution Approach 1:
The patent systematically extracts different types of impurities from silane gas through sequential processing. The first distillation column extracts lighter impurities, the second extracts heavier impurities, and the molecular sieve extracts ethylene. This multi-stage extraction process achieves high recovery efficiency by removing all major impurity categories.
Solution Approach 2:
The patent uses molecular sieve, a porous material with specific pore size distribution, to selectively adsorb ethylene molecules from silane gas. The porous structure allows size-based separation, achieving efficient removal of ethylene impurities and improving overall silane recovery efficiency to high purity levels.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Achieves high-purity silane recovery with 94.4% efficiency, effectively removing impurities and ensuring safety through emergency protocols, suitable for semiconductor and battery industries.
Implementation Method 1
a cooling space installed on an upper portion of the primary cyclone droplet unit to reduce a temperature of silane gas passing through the primary cyclone droplet unit by a cooling unit
Implementation Method 2
a primary cyclone droplet unit installed on the lower portion inside the housing to convert silane gas introduced through the gas inlet into droplets
Data Source
AI summary
The present invention relates to a silane recovery device and method and, more specifically, is to provide a silane recovery device and method, which enable the recovery and recycling of silane by efficiently removing impurities such as hydrogen, nitrogen, etc., from silane gas, which is an unreacted by-product generated from processes using silane as a raw material in the fields of silane manufacturing facilities or semiconductors, displays, batteries, etc.