Silencer Assembly Using Heated Nitrogen to Prevent Byproduct Blockage
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Solution Overview
Problem
Semiconductor manufacturing vacuum pumps face blockage issues due to the solidification of byproducts within the silencer, which is not effectively addressed by conventional nitrogen gas injection devices, and this leads to energy inefficiencies from using additional heat sources.
Innovation Solution
An energy-saving silencer assembly is designed where nitrogen gas is heated by the high temperature surface of the silencer itself, and this heated gas is supplied back into the silencer through a double pipe structure with a preheating pipe and guide wire to prevent solidification, eliminating the need for an additional heat source.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If an additional heat source is used to heat nitrogen gas for preventing byproduct solidification, then the blockage problem is solved, but energy costs increase
Solution Approach 1:
The silencer uses its own high-temperature surface to heat the nitrogen gas, making the system self-sufficient without requiring external heating equipment. The silencer's surface, already at high temperature from its function in the exhaust system, is utilized to preheat the nitrogen gas before injection, thereby preventing byproduct solidification while avoiding additional energy consumption from separate heating devices.
Solution Approach 2:
The heating function is merged with the silencer's existing high-temperature surface rather than being a separate process. The nitrogen gas heating and byproduct prevention functions are combined into the silencer assembly, eliminating the need for standalone heating equipment and reducing overall energy requirements.
2Temperature
If nitrogen gas is heated by contact with silencer surface in a heating space, then heating efficiency is improved, but device complexity increases
Solution Approach 1:
The heating space is formed by nesting the silencer inside an outer pipe, creating a compact annular heating chamber. This nested structure allows the nitrogen gas to flow between the silencer surface and the outer pipe, maximizing contact area while maintaining a space-efficient design that integrates smoothly into the existing vacuum pump structure.
Solution Approach 2:
The heating space acts as an intermediary zone between the high-temperature silencer surface and the nitrogen gas. This intermediate space allows controlled heat transfer from the silencer to the nitrogen gas through thermal conduction and convection, ensuring efficient heating while maintaining structural integrity and ease of assembly.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution effectively prevents blockages by ensuring the nitrogen gas is heated efficiently using the silencer's surface temperature, reducing energy costs and enhancing heat exchange through a larger contact area and time with the silencer surface, thereby maintaining a flow-efficient operation.
Implementation Method 1
a nitrogen gas injection section for injecting into the silencer the nitrogen gas heated by being brought into contact with the outer peripheral surface of the silencer in the heating space
Data Source
AI summary
The disclosure relates to an energy-saving silencer assembly, which includes: a silencer connected to a discharge side of a pump section, which pumps reaction by-product gas into a vacuum pump, so as to pass the pumped reaction by-product gas from a rear end portion to a front end portion; an outer pipe surrounding the outer peripheral surface of the silencer at an interval so as to provide a heating space between the silencer and the outer pipe; a nitrogen gas supply section for supplying nitrogen gas to the heating space; and a nitrogen gas injection section for injecting heated nitrogen gas to the inside of the silencer by the contact with the outer peripheral surface of the silencer in the heating space.