Vitreous Silica Crucible Bubble Gradient for Silicon Pulling Stability

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Solution Overview

Problem

Conventional vitreous silica crucibles experience unstable pulling of single-crystal silicon due to melt surface vibration, particularly at the initial stage of pulling, leading to reduced yield and susceptibility to pulling failures, as the bubble content near the melt surface is insufficiently controlled.

Innovation Solution

A vitreous silica crucible with a unique bubble distribution, where the upper end portion has a higher bubble content (0.1 vol% or more) increasing by 0.002 vol% to 0.008 vol% per mm, while the lower portion has less than 0.1 vol%, is manufactured using synthetic fused silica powder with specific particle size and carbon content to suppress melt surface vibration and stabilize the shoulder portion formation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Use of energy by moving object

If the inner surface layer is formed as a transparent glass layer with minimal bubbles through evacuation, then heat transfer efficiency is improved, but melt surface vibration occurs at the initial stage of pulling

Engineering Contradiction:
Improveheat transfer efficiencyVSAvoidmelt surface stability
Core Design Contradiction:
Use of energy by moving objectVSReliability

Solution Approach 1:

The patent applies local quality by creating different bubble content zones within the inner surface layer: the lower portion has minimal bubbles (<0.1 vol%) for optimal heat transfer, while the upper end portion has controlled bubble content (0.1 vol% or more) to suppress melt surface vibration. This spatial differentiation of material properties resolves the contradiction between heat transfer efficiency and melt surface stability.

Inventive Principle:
Principle #3Local quality

2Reliability

If bubble content in the inner surface layer is reduced to eliminate vibration, then melt surface stability is improved, but shoulder portion formation becomes unstable

Engineering Contradiction:
Improvemelt surface stabilityVSAvoidshoulder portion formation stability
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The patent differentiates bubble content distribution vertically within the inner surface layer, placing bubbles specifically in the upper end portion that corresponds to the shoulder formation zone. This localized bubble presence stabilizes shoulder portion formation while the lower bubble-free region maintains melt surface stability, resolving the contradiction between these two requirements.

Inventive Principle:
Principle #3Local quality

3Ease of manufacture

If uniform bubble distribution is maintained throughout the inner surface layer, then manufacturing simplicity is preserved, but both heat transfer efficiency and melt surface stability deteriorate

Engineering Contradiction:
Improvemanufacturing simplicityVSAvoidheat transfer efficiency
Core Design Contradiction:
Ease of manufactureVSUse of energy by moving object

Solution Approach 1:

The patent implements non-uniform bubble distribution with a gradient structure: the lower portion has <0.1 vol% bubbles for efficient heat transfer, while the upper end portion has 0.1 vol% or more bubbles for vibration suppression. This localized differentiation optimizes both heat transfer efficiency and melt surface stability, overcoming the limitations of uniform bubble distribution.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The crucible effectively suppresses melt surface vibration and stabilizes the formation of the shoulder portion, achieving high single-crystal silicon yield by controlling bubble distribution and heat transfer efficiency.

Implementation Method 1

an upper end portion of an inner surface layer of the crucible and a lower portion located below the upper end portion have a different amount of bubbles... the amount of bubbles in the lower portion is less than 0.1 vol% and the amount of bubbles in the upper end portion is 0.1 vol% or more... vibration of the melt surface is suppressed

Methodology Applied
Scientific EffectVibration damping: Damping

Implementation Method 2

the outer surface portion of the vitreous silica crucible is formed of a bubble containing layer containing a plurality of bubbles... disperses external radiant heat and uniformly transfers the heat to the inside of a mold

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 3

the inner surface portion of the vitreous silica crucible is formed of a transparent glass layer which does not substantially contains bubbles... in contact with the silicon melt

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentEP2267192B1Method of pulling single crystal silicon using a vitreous silica crucible and method for manufacturing quartz glass crucible
Publication Date: 2013.07.31 JAPAN SUPER QUARTZ CORP
  • EP2267192B1 patent drawingFigure 1
  • EP2267192B1 patent drawingFigure 2
  • EP2267192B1 patent drawingFigure 3

AI summary

A vitreous silica crucible for pulling single-crystal silicon, in which the vibration of a melt surface at the initial stage of the pulling of single-crystal silicon can be suppressed, a shoulder portion of single-crystal silicon can be stably formed, and a high yield of single-crystal silicon can be achieved.