Porous Silica Chemical Filter Composite for NO Removal
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Solution Overview
Problem
Conventional chemical filters used in semiconductor and display manufacturing facilities are inefficient in removing nitrogen monoxide (NO) and require frequent replacement, leading to increased operational costs and product defects, especially during high NOx concentration periods.
Innovation Solution
A composite chemical filter comprising a matrix of porous silica with manganese-based oxide impregnated within it, formulated to achieve a specific weight percentage and pore volume ratio, enhancing the removal efficiency of nitrogen monoxide and extending the filter's lifespan.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If alumina impregnated with potassium permanganate is used to remove nitrogen monoxide, then nitrogen monoxide removal function is provided, but processing efficiency is low and product defects occur due to increased NOx inflow
Solution Approach 1:
The patent changes the material parameters by replacing alumina with porous silica as the support matrix and using manganese oxide instead of potassium permanganate impregnation. This parameter change results in higher processing efficiency for nitrogen monoxide removal while maintaining the removal function, directly resolving the contradiction between reliability and productivity.
Solution Approach 2:
The patent employs a composite material structure consisting of porous silica support combined with manganese oxide active component. This composite material provides both the structural integrity needed for filter operation and the chemical activity required for efficient nitrogen monoxide removal, thereby improving processing efficiency while maintaining removal function.
2Adaptability or versatility
If conventional chemical filters are used, then ammonia, ammonium, ozone and acidic gases are removed, but nitrogen monoxide removal function is absent
Solution Approach 1:
The patent creates a universal chemical filter material that can handle multiple types of chemical contaminants including nitrogen monoxide, ammonia, acidic gases, and ozone. The manganese oxide on porous silica support provides broad-spectrum chemical reactivity, making the filter adaptable to various contaminant types while ensuring reliable nitrogen monoxide removal capability.
3Ease of manufacture
If existing chemical filters are used, then chemical filtering is provided, but replacement work takes too much time and costs too much due to short replacement cycle
Solution Approach 1:
The patent utilizes porous silica as the support material, which provides high surface area and porous structure that enhances the loading capacity of manganese oxide. This allows the filter to process more contaminants before saturation, extending the filter lifespan and reducing replacement frequency, thereby addressing the contradiction between manufacturing simplicity and operational duration.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The composite filter significantly improves nitrogen monoxide removal efficiency and extends the filter's lifespan, reducing operational costs and minimizing product defects by effectively handling high NOx concentrations.
Implementation Method 1
The alumina impregnated with potassium permanganate converts the nitrogen monoxide to nitrogen dioxide
Implementation Method 2
a manganese-based oxide impregnated in the matrix
Data Source
AI summary
The present disclosure relates to a composite for a chemical filter, a preparing method thereof, and an outdoor air conditioner including the same. The composite includes a matrix including porous silica, and a manganese-based oxide impregnated in the matrix. The composite satisfies Equation 1:4.2≤WMn/PVSi≤20<Equation 1>in which WMn represents wt % of the manganese-based oxide with reference to 100 wt % of the composite for a chemical filter, and PVSi represents a pore volume of porous silica.