Silica Sol Production Using Linked Core Particles for CMP
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing methods for producing silica sols do not effectively increase the ratio of heteromorphized silica particles, which are necessary for improving polishing rates in chemical mechanical polishing processes.
Innovation Solution
A method involving the preparation of a first liquid with silica core particles having an average diameter of 20 nm or less, followed by holding this liquid for 72 hours or longer to form linked silica core particles, which are then further processed to enhance the heteromorphization of silica particles.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If existing methods for producing silica sol are used, then silica particles can be obtained, but the ratio of heteromorphized silica particles is insufficient
Solution Approach 1:
The patent changes key parameters including using silica core particles with average diameter of 20 nm or less (size parameter), holding the first liquid for 72 hours or longer (time parameter), and controlling the composition ratios of alkoxysilane, water, and organic solvent (concentration parameters) to achieve high ratio of heteromorphized silica particles
Solution Approach 2:
The patent performs preliminary formation of silica core particles with controlled size (20 nm or less) before the main heteromorphization process. This preliminary action of creating small uniform cores enables subsequent efficient heteromorphization during the holding period, leading to higher polishing rates
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method significantly increases the ratio of heteromorphized silica particles, leading to improved polishing rates and reduced surface roughness in CMP processes.
Implementation Method 1
preparing a first liquid including silica core particles having an average value of longest diameters of primary particles of 20 nm or less, and preparing a second liquid including linked silica core particles by holding the first liquid for 72 hours or longer
Implementation Method 2
holding the first liquid for 72 hours or longer to form linked silica core particles
Data Source
AI summary
Provided is a method for producing a silica sol capable of increasing the ratio of heteromorphized silica particles. A method for producing a silica sol according to an aspect of the present disclosure includes a step of preparing a first liquid including silica core particles having an average value of longest diameters of primary particles of 20 nm or less, and a step of preparing a second liquid including linked silica core particles by holding the first liquid for 72 hours or longer.