Silicon Acousto-Optic Modulator with Nested Resonators

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Current acousto-optic modulators face challenges in miniaturization and efficiency, particularly in converting acoustic phase modulation into intensity phase modulation for chip-scale applications, which affects their performance in advanced data processing systems.

Innovation Solution

The integration of an electro-mechanical resonator with a photonic resonator and a radiation pressure-driven detector on a silicon-on-insulator substrate, allowing for the modulation of optical signals through mechanical motion and optical waveguides, enabling efficient signal processing and reduced power consumption.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If traditional acousto-optic modulator structures are used, then optical signal modulation can be achieved, but the device size is large and not suitable for chip-scale integration

Engineering Contradiction:
Improvedevice sizeVSAvoidchip-scale integration capability
Core Design Contradiction:
Volume of moving objectVSAdaptability or versatility

Solution Approach 1:

The patent combines the electro-mechanical resonator and photonic resonator into a single integrated structure where the mechanical resonator's moving core component is positioned within the photonic resonator. This merging allows the device to function as both a mechanical oscillator and an optical modulator in one compact unit, enabling chip-scale integration while maintaining modulation functionality.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The electro-mechanical resonator is nested within the photonic resonator structure, with the mechanical resonator's moving core component positioned inside the optical resonator's mode confinement region. This nested configuration allows the smaller mechanical structure to be housed within the optical structure, achieving miniaturization suitable for chip-scale applications.

Inventive Principle:
Principle #7Nested doll (Nesting)

2Use of energy by moving object

If acoustic phase modulation is converted to intensity phase modulation using traditional structures, then signal processing can be performed, but power consumption is high

Engineering Contradiction:
Improvepower consumptionVSAvoidsignal processing efficiency
Core Design Contradiction:
Use of energy by moving objectVSProductivity

Solution Approach 1:

The patent replaces traditional acoustic wave generation and detection mechanisms with a direct electro-mechanical resonator coupled to a photonic resonator. The electro-mechanical resonator converts electrical signals directly to mechanical vibrations, which then modulate the photonic resonator's optical properties, eliminating the need for separate acoustic transducers and reducing power consumption.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent utilizes changes in the photonic resonator's resonant frequency and quality factor in response to mechanical vibrations from the electro-mechanical resonator. By monitoring these optical parameter changes, the system achieves efficient signal processing with reduced power requirements compared to traditional acoustic methods.

Inventive Principle:
Principle #35Parameter changes

3Volume of moving object

If the modulator is miniaturized to chip-scale, then integration is improved, but phase-noise performance deteriorates

Engineering Contradiction:
Improvedevice sizeVSAvoidphase-noise performance
Core Design Contradiction:
Volume of moving objectVSReliability

Solution Approach 1:

The patent employs a high-Q electro-mechanical resonator operating at its resonant frequency to generate precise mechanical vibrations. The resonant operation ensures stable frequency and low phase noise, while the compact size of the resonator enables chip-scale integration. The dynamic resonant behavior maintains phase-noise performance despite miniaturization.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The device uses a composite structure combining electro-mechanical and photonic components in close proximity. The electro-mechanical resonator provides stable mechanical oscillation with low phase noise, while the photonic resonator converts this to optical modulation. This composite approach maintains reliable phase-noise performance in a miniaturized format.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach results in a compact, low-power acousto-optic modulator with improved phase-noise performance, capable of up-converting radio frequency signals into optical signals with minimal inefficiency and reduced phase noise, suitable for high-frequency applications.

Implementation Method 1

an electro-mechanical resonator with a photonic resonator

Methodology Applied
Scientific EffectElectro-mechanical resonance: Resonance

Implementation Method 2

modulation of optical signals through mechanical motion

Methodology Applied
Scientific EffectOptomechanical modulation:

Implementation Method 3

a radiation pressure driven detector

Methodology Applied
Scientific EffectRadiation pressure: Radiation Pressure

Data Source

PatentUS9036951B2Silicon acousto-optic modulator structure and method
Publication Date: 2015.05.19 CORNELL UNIV CORNELL CENT FOR TECH ENTERPRISE & COMMLIZATION CCTEC
  • US9036951B2 patent drawing
  • US9036951B2 patent drawing
  • US9036951B2 patent drawing

AI summary

An electro-optic structure, which may comprise an acousto-optic modulator for use in an opto-acoustic oscillator, comprises a plurality of rigidly connected resonator core components located movably separated over a substrate and anchored to the substrate at an anchor point. An actuator electrode is located separated from a first one of the rigidly connected resonator core components and an optical waveguide is located separated from a second one of the rigidly connected resonator core components. Radio frequency and direct current actuation of the actuator electrode provides a mechanical vibration in the first rigidly connected resonator core component that is mechanically coupled to the second rigidly connected resonator core component which serves to optically modulate light transported through the wave guide. Reverse operation is also contemplated. Embodiments also contemplate a third rigidly connected resonator core component as a radiation pressure driven detector. Further contemplated are related fabrication and operation methods.