Silicon Atomization Core Structure to Prevent MEMS Substrate Cracking

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Solution Overview

Problem

Existing MEMS atomization cores using silicon substrates with microholes for oil conduction and atomization are prone to cracking due to reduced strength, leading to abnormal effects during assembly and operation.

Innovation Solution

An atomization core with a heating member composed of a first, second, and third region, where the third region is made of a silicon-based material doped with metal atoms and has a higher temperature to generate aerosol, eliminating the need for numerous microholes, and featuring an atomization groove and limiting groove for structural integrity and efficient heat concentration.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a large number of microholes are etched on the substrate to absorb atomization substrate, then the atomization core can achieve oil conduction and atomization function, but the strength of the atomization core is reduced and it is prone to cracking during assembly process

Engineering Contradiction:
Improveatomization functionVSAvoidsubstrate strength
Core Design Contradiction:
ReliabilityVSStrength

Solution Approach 1:

The patent uses a porous ceramic material (alumina, cordierite, or silicon carbide) as the atomization core substrate. This porous structure provides numerous microchannels for oil conduction and atomization while maintaining structural integrity, eliminating the need to etch microholes into a solid substrate and thus preventing strength reduction and cracking issues.

Inventive Principle:
Principle #31Porous materials

Solution Approach 2:

The patent employs composite material construction by combining the porous ceramic substrate with a metal mesh layer (stainless steel, nickel, or copper mesh with 100-200 mesh density). This composite structure enhances the mechanical strength of the atomization core while maintaining the porous pathways needed for oil conduction and atomization function.

Inventive Principle:
Principle #40Composite materials

2Use of energy by moving object

If the heating member is made of silicone-based material doped with metal atoms to concentrate heat in the third region, then power consumption is reduced and aerosol generation is improved, but the manufacturing process becomes more complex

Engineering Contradiction:
Improvepower consumptionVSAvoidmanufacturing complexity
Core Design Contradiction:
Use of energy by moving objectVSEase of manufacture

Solution Approach 1:

The heating member features non-uniform doping distribution where metal atoms (silver, copper, or aluminum) are concentrated in the third region corresponding to the atomization area. This creates localized high-resistance zones that generate heat preferentially where needed, reducing overall power consumption while maintaining effective atomization. The doping concentration varies spatially, with higher concentrations in the third region and lower concentrations in other regions.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enhances the strength and integrity of the atomization core, prevents cracking during assembly, improves oil conduction and atomization efficiency, reduces power consumption, and ensures consistent aerosol generation.

Implementation Method 1

the heating member comprises a first electrode contact and a first heat-transferring area; the second region is provided with a second electrode contact and a second heat-transferring area

Methodology Applied
Scientific EffectJoule heating: Joule Heating

Implementation Method 2

the third region heats the atomization substrate to generate aerosol

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 3

Providing a doped conductive semiconductor substrate

Methodology Applied
Scientific EffectElectrical conduction: Conduction (electrical)

Implementation Method 4

In working state, the temperature of the third region is higher than that of the first heat heat-transferring area and higher than that of the second heat-transferring area

Methodology Applied
Scientific EffectJoule heating: Joule Heating

Implementation Method 5

Performing oxidation insulation treatment on the substrate

Methodology Applied
Scientific EffectOxidation: Oxidation

Data Source

PatentEP4714277A1Atomization core and preparation method therefor, atomization assembly and atomization device
Publication Date: 2026.03.25 IMIRACLE (HK) LIMITED
  • EP4714277A1 patent drawingFigure 1
  • EP4714277A1 patent drawingFigure 2
  • EP4714277A1 patent drawingFigure 3

AI summary

The present application discloses a method for preparing atomization core, atomization core, atomization assembly, and atomization device, relates to the technical field of electronic atomizers. The atomization core is provided with a heating member, which is processed from a silicon-based material and can heat an atomization substrate to generate aerosol. The heating member includes a first region, a second region, and a third region. The first region is provided with a first electrode contact and a first heat-transferring area, and the second region is provided with a second electrode contact and a second heat-transferring area. The third region is located between the first region and the second region, and is electrically connected to the first electrode contact and the second electrode contact respectively. In the working state, the temperature of the third region is higher than that of the first heat-transferring area and higher than that of the second heat-transferring area, and the third region heats the atomization substrate to generate aerosol. The atomization core provided in the present application eliminates the need for etching a large number of microholes on the heating element, improves the integrity and strength of the heating element, prevents the atomization core from cracking during assembly, and thus ensures the oil conduction and atomization effects of the atomization core.