Silicon Carbide Vertical Alignment Layer for LCD Manufacturing

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Solution Overview

Problem

Conventional vertical alignment layers in liquid crystal displays using polyimide-containing materials face challenges in uniform formation on larger substrates and lack adjustable pre-tilting angles, affecting manufacturing productivity and response speed.

Innovation Solution

A method to form a vertical inorganic alignment layer using silicon carbide, achieved through chemical vapor deposition or sputtering, where silicon-containing and carbon-containing gases react to form a silicon carbide layer with adjustable pre-tilt angles by controlling radio frequency power ratios.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If the size of the process substrate is increased to reduce product costs, then manufacturing cost is reduced, but uniform formation of the polyimide-containing material becomes difficult

Engineering Contradiction:
Improvemanufacturing costVSAvoiduniformity of alignment layer
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The patent changes the material parameter from organic polyimide to inorganic silicon carbide, and changes the deposition method parameters (CVD or sputtering) to achieve uniform coverage on large substrates. The inorganic material system allows for better control of film uniformity across large areas compared to conventional organic polyimide printing and curing processes.

Inventive Principle:
Principle #35Parameter changes

2Ease of manufacture

If conventional polyimide-containing materials are used for vertical alignment layer, then the alignment layer can be formed, but the pre-tilting angle is not adjustable

Engineering Contradiction:
Improvealignment layer formationVSAvoidpre-tilting angle adjustability
Core Design Contradiction:
Ease of manufactureVSAdaptability or versatility

Solution Approach 1:

The patent introduces dynamic adjustability of the pre-tilting angle through control of deposition parameters during CVD or sputtering processes. By varying parameters such as gas flow ratios, temperature, or power during deposition, the pre-tilting angle can be dynamically adjusted to optimize response speed, making the system adaptable rather than fixed.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent enables continuous adjustment of the pre-tilting angle by changing deposition parameters during the inorganic alignment layer formation process. This allows optimization of response speed according to specific application requirements, providing versatility that conventional polyimide materials cannot achieve.

Inventive Principle:
Principle #35Parameter changes

3Device complexity

If the vertical alignment layer uses polyimide-containing material with fixed pre-tilting angle, then manufacturing is simplified, but response speed of the liquid crystal display apparatus is limited

Engineering Contradiction:
Improvemanufacturing process complexityVSAvoidresponse speed
Core Design Contradiction:
Device complexityVSSpeed

Solution Approach 1:

The patent makes the pre-tilting angle a dynamic parameter that can be adjusted during deposition to optimize response speed. This dynamic control allows the system to achieve faster response speeds by optimizing the alignment layer's pre-tilting angle according to specific performance requirements, rather than being constrained by fixed values from conventional materials.

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach simplifies the manufacturing process, improves productivity, and allows for adjustable pre-tilt angles, enhancing the response speed and alignment properties of liquid crystal displays.

Implementation Method 1

A silicon-containing gas and a carbon-containing gas are injected into the process chamber such that the silicon-containing gas and the carbon-containing gas react with each other. Thus, a vertical inorganic alignment layer comprising a silicon carbide is formed on the process substrate.

Methodology Applied
Scientific EffectChemical vapor deposition: Chemical Vapour Deposition

Implementation Method 2

A power voltage is supplied to the first and second targets to activate the nonvolatile gas in a plasma state. Thus, the activated nonvolatile gas in the plasma state collides with the first and second targets such that silicon atoms and carbon atoms are discharged from the first and second targets, thereby forming a vertical inorganic alignment layer comprising a silicon carbide on the process substrate.

Methodology Applied
Scientific EffectPlasma: Plasma

Implementation Method 3

A power voltage is supplied to the first and second targets to activate the nonvolatile gas in a plasma state. Thus, the activated nonvolatile gas in the plasma state collides with the first and second targets such that silicon atoms and carbon atoms are discharged from the first and second targets

Methodology Applied
Scientific EffectSputtering: Sputtering

Data Source

PatentUS7755733B2Method of forming vertical inorganic alignment layer and liquid crystal display apparatus having the same
Publication Date: 2010.07.13 SAMSUNG DISPLAY CO LTD
  • US7755733B2 patent drawing
  • US7755733B2 patent drawing
  • US7755733B2 patent drawing

AI summary

A liquid crystal display apparatus includes a first display substrate, a second display substrate and a liquid crystal layer disposed therebetween. The first and second display substrates include first and second vertical inorganic alignment layers, respectively, to vertically align liquid crystal molecules of the liquid crystal layer. The first and second vertical inorganic alignment layers each include a silicon carbide and are formed on the first and second display substrates, respectively, by a chemical vapor deposition method or a sputtering method. Thus, processes for the vertical inorganic alignment layer may be simplified, thereby improving manufacturing productivity of the liquid crystal display apparatus.