Silicon Carbide Single-Crystal Growth With Alternating Crucible Heating

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Solution Overview

Problem

Existing methods for growing silicon carbide single crystals face challenges in reducing miscellaneous crystals, which inhibit the growth of high-quality silicon carbide single crystals due to their attachment to the seed crystal, leading to reduced raw material usage and growth speed.

Innovation Solution

A method involving a single crystal manufacturing apparatus with alternating heating steps to control the temperature gradient within the crucible, where the temperature of the solution in contact with the side surface alternates with that of the bottom surface, promoting the dissolution of miscellaneous crystals and preventing their continuous precipitation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional heating methods are used to grow silicon carbide single crystals, then crystal growth can be achieved, but miscellaneous crystals are generated and attach to the seed crystal, reducing growth quality

Engineering Contradiction:
Improvesingle crystal qualityVSAvoidmiscellaneous crystal generation
Core Design Contradiction:
Manufacturing precisionVSObject-generated harmful factors

Solution Approach 1:

The patent applies periodic action by alternately heating the side surface and bottom surface of the crucible in a cyclic manner. This periodic temperature gradient reversal prevents miscellaneous crystals from continuously precipitating and attaching to the seed crystal, while still enabling controlled silicon carbide crystal growth. The alternating heating creates dynamic temperature conditions that dissolve previously formed miscellaneous crystals before they can attach.

Inventive Principle:
Principle #19Periodic action

Solution Approach 2:

The patent changes the temperature distribution parameters by switching between side-surface heating and bottom-surface heating modes. This parameter change creates different temperature gradients that control the precipitation and dissolution of miscellaneous crystals. By adjusting which surface is heated, the system can control the thermal field to prevent harmful crystal formation while maintaining desired crystal growth conditions.

Inventive Principle:
Principle #35Parameter changes

2Productivity

If the temperature gradient is continuously maintained in one direction, then crystal growth is promoted, but miscellaneous crystals continuously precipitate and attach to the seed crystal

Engineering Contradiction:
Improvecrystal growth speedVSAvoidsingle crystal quality
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The system uses periodic action to alternate between promoting crystal growth and dissolving miscellaneous crystals. During side-surface heating phases, temperature gradients promote silicon carbide crystal growth. During bottom-surface heating phases, the reversed gradient dissolves miscellaneous crystals. This periodic switching maintains high productivity while ensuring high manufacturing precision by continuously removing harmful factors.

Inventive Principle:
Principle #19Periodic action

Solution Approach 2:

The patent converts the harmful effect of temperature gradients that cause miscellaneous crystal precipitation into a beneficial effect. By alternately reversing the temperature gradient direction, the system uses the same thermal mechanism to both promote crystal growth and dissolve miscellaneous crystals. The harmful temperature gradient effect is transformed into a dual-purpose tool for both growth promotion and impurity removal.

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

3Manufacturing precision

If heating is applied to dissolve miscellaneous crystals, then crystal quality improves, but the heating process becomes more complex

Engineering Contradiction:
Improvesingle crystal qualityVSAvoidheating system complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The heating system is segmented into independent side-surface heating and bottom-surface heating components. This segmentation allows independent control of temperature gradients in different regions. By dividing the heating function into separate controllable parts, the system can selectively apply heat to dissolve miscellaneous crystals without requiring a completely complex integrated heating system. Each heating zone can be controlled independently to achieve the desired temperature distribution.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach effectively reduces miscellaneous crystals and suppresses their growth, ensuring stable and efficient production of high-quality silicon carbide single crystals by alternating the heating of the crucible's side and bottom surfaces to manage temperature gradients.

Implementation Method 1

a first heating step of heating the solution so that a temperature of the solution in contact with a side surface of the crucible becomes higher than a temperature of the solution in contact with a bottom surface of the crucible; and a second heating step of heating the solution so that the temperature of the solution in contact with the bottom surface of the crucible becomes higher than the temperature of the solution in contact with the side surface of the crucible

Methodology Applied
Scientific EffectTemperature gradient: Temperature Gradient

Implementation Method 2

The temperature of the solution in contact with the side surface of the crucible becomes higher than the temperature of the solution in contact with the bottom surface of the crucible

Methodology Applied
Scientific EffectConvection: Convection

Data Source

PatentUS12448701B2Single crystal manufacturing method, single crystal manufacturing apparatus and crucible
Publication Date: 2025.10.21 PROTERIAL LTD
  • US12448701B2 patent drawing
  • US12448701B2 patent drawing
  • US12448701B2 patent drawing

AI summary

Miscellaneous crystals generated in a solution are reduced. A single crystal manufacturing method includes a first heating step of heating the solution so that a temperature of the solution in contact with a side surface of a crucible becomes higher than a temperature of the solution in contact with a bottom surface of the crucible, and a second heating step of heating the solution so that the temperature of the solution in contact with the bottom surface of the crucible becomes higher than the temperature of the solution in contact with the side surface of the crucible.