Silicon Membrane Valve Structure for Compact Vacuum Gas Control
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Traditional semiconductor processing gas control systems are bulky and inefficient, leading to wasted gas due to long flow paths and the need for multiple, large components.
Innovation Solution
The development of compact microfluidic valve structures using non-elastomeric, non-polymeric, and non-metallic materials, such as silicon or silicon dioxide, which are bonded together to form a layered stack, allowing for precise control of gas flow with reduced component size.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If traditional discrete components with large mounting flanges are used, then ease of manufacture and reliability are improved, but device volume and gas flow path length increase
Solution Approach 1:
The patent merges multiple discrete components (valve body, seat, diaphragm, seals, mounting flange) into a single integrated microfluidic valve structure fabricated as one piece using silicon-based semiconductor manufacturing processes. This consolidation eliminates the need for separate mounting flanges and multiple assembly steps, reducing overall device volume while maintaining reliability through monolithic construction.
Solution Approach 2:
The invention transitions from traditional two-dimensional planar component layouts with large mounting flanges to a three-dimensional microfabricated structure with vertical integration. The valve features multi-layer construction with the diaphragm positioned above the valve body in the vertical dimension, enabling compact packaging and significantly reduced gas box volume while maintaining all necessary functional interfaces.
2Ease of manufacture
If traditional discrete components with long flow paths are used, then ease of manufacture is improved, but gas wastage increases
Solution Approach 1:
The patent integrates the gas flow path directly into the monolithic valve structure, eliminating separate flow channels and connection interfaces between discrete components. The gas flows directly through the microfabricated valve body from inlet to outlet, minimizing dead volume and preventing gas wastage while maintaining manufacturing simplicity through standard semiconductor fabrication processes.
Solution Approach 2:
The invention extracts and eliminates unnecessary flow path segments, connection interfaces, and dead volume regions that exist in traditional discrete component assemblies. By removing these extraneous elements and retaining only the essential valve functionality in a compact monolithic structure, gas wastage is minimized while manufacturing remains straightforward using established silicon-based processes.
3Reliability
If multiple large surface-mount components are used, then reliability is improved, but device complexity and assembly difficulty increase
Solution Approach 1:
The patent combines multiple separate gas control components (valve body, seat structure, diaphragm assembly, seals, and mounting interfaces) into a single monolithic microfluidic valve. This integration eliminates the complexity of assembling 5-10 separate surface-mount components while maintaining reliability through precise microfabrication of all critical sealing and flow control features in one manufacturing process.
Solution Approach 2:
The invention replaces traditional mechanical assembly methods (screws, clips, adhesives, O-ring installations) with a monolithic microfabricated structure where all components are permanently integrated through semiconductor bonding processes. This substitution eliminates assembly complexity and potential assembly errors while maintaining or improving reliability through consistent, repeatable manufacturing.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution provides a more compact and cost-effective gas flow control system, minimizing gas wastage and improving the efficiency of semiconductor processing operations by enabling precise control of gas mixtures and flow rates.
Implementation Method 1
the diaphragm, the raised seat structure, and the gap of that microfluidic valve structure may be sized such that, when that microfluidic valve structure is transitioned to an actuated state by pressurizing the second side of the diaphragm to a first pressure, a portion of the diaphragm is caused to elastically deform towards, and seal against, the raised seat structure
Data Source
AI summary
Non-elastomeric, non-polymeric, non-metallic membrane valves for use in high-vacuum applications are disclosed. Such valves are functional even when the fluid-control side of the valve is exposed to a sub-atmospheric pressure field which may generally act to collapse/seal traditional elastomeric membrane valves.