Silicon Modulator PN Junction Segmentation for Efficiency

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Solution Overview

Problem

The existing silicon-based Mach-Zehnder Interferometer (MZI) modulators have a short PN junction length and small function range, leading to low modulation efficiency and challenges in device integration due to their simple longitudinal single-PN junction structure.

Innovation Solution

The modulator design incorporates a silicon-based MZI structure with a PN junction having a larger functional area, featuring doped regions arranged in strip-shaped or dot matrix patterns, and utilizing ion injection and etching processes to form doped regions with expanded contact areas, enhancing modulation efficiency and integration capabilities.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If a simple longitudinal single-PN junction structure is used, then the device structure is simple, but the modulation efficiency is low

Engineering Contradiction:
Improvestructure complexityVSAvoidmodulation efficiency
Core Design Contradiction:
Device complexityVSReliability

Solution Approach 1:

The patent divides the single PN junction into multiple PN junctions arranged in specific patterns (strip-shaped or dot matrix). This segmentation increases the total junction area and improves modulation efficiency while maintaining a relatively simple overall structure that can be integrated into silicon-based circuits.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent transitions from a one-dimensional longitudinal single-PN junction to a two-dimensional multi-PN junction arrangement with strip-shaped or dot matrix patterns. This dimensional expansion significantly increases the functional area of the PN junction without proportionally increasing device length, thereby improving modulation efficiency.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Device complexity

If a simple longitudinal single-PN junction structure is used, then the device structure is simple, but the function range is small

Engineering Contradiction:
Improvestructure complexityVSAvoidfunction range
Core Design Contradiction:
Device complexityVSArea of stationary object

Solution Approach 1:

The patent segments the PN junction into multiple smaller junctions arranged in strip-shaped or dot matrix patterns. This segmentation expands the total functional area by distributing the junctions across a larger region while maintaining individual junction simplicity, thus increasing the overall function range.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent expands from a linear one-dimensional junction to a two-dimensional array of junctions. This dimensional transition dramatically increases the functional area available for modulation without requiring a proportional increase in device footprint, enabling better integration.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Reliability

If a very long device is used to achieve effective modulation, then the modulation efficiency is improved, but the device integration is poor

Engineering Contradiction:
Improvemodulation efficiencyVSAvoidintegration capability
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent resolves this contradiction by transitioning to a two-dimensional multi-PN junction arrangement. This allows the device to achieve high modulation efficiency through increased junction area without requiring a long device length, thereby improving integration capability and reducing device footprint.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent changes the structural parameters from a single longitudinal junction to multiple junctions arranged in specific patterns. This parameter change increases the effective modulation area while controlling device dimensions, achieving both high modulation efficiency and good integration capability.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The expanded PN junction area significantly improves modulation efficiency and facilitates device integration, with the ion injection method providing a stable and reliable fabrication process, doubling or tripling the modulation efficiency compared to traditional modulators depending on the doped region configuration.

Implementation Method 1

utilizing ion injection and etching processes to form doped regions with expanded contact areas

Methodology Applied
Scientific EffectIon injection: Ion Implantation

Implementation Method 2

utilizing ion injection and etching processes to form doped regions

Methodology Applied
Scientific EffectEtching: Ablation

Data Source

PatentEP3264166B1Silicon-based modulator and method for fabrication thereof
Publication Date: 2020.04.29 ZTE CORP
  • EP3264166B1 patent drawingFigure 1(a)~2(b)
  • EP3264166B1 patent drawingFigure 3(a)~3(b)
  • EP3264166B1 patent drawingFigure 4(a)~5

AI summary

Provided are a silicon-based modulator and a method for fabricating the silicon-based modulator. The silicon-based modulator includes: a first heavily doped contact region, a second heavily doped contact region, and a modulation arm working region including a first type doped region and a second type doped region. The first heavily doped contact region connected with the first type doped region and the second heavily doped contact region are located at the left and right sides of the modulation arm working region, respectively. A PN junction is formed in a contact region between the first type doped region and the second type doped region. An area of the contact region formed between the first type doped region and the second type doped region in the modulation arm working region is greater than an area of a smallest contact region between the first type doped region and the second type doped region.