Silicon Nitride Wavelength Selector for Stable Laser Frequency Locking

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Solution Overview

Problem

Existing optical wavelength lockers face challenges in achieving precise control of resonance frequency due to high temperature coefficient of silicon-based components, which limits the stability and tunability of laser frequencies.

Innovation Solution

An integrated wavelength selector is designed with a ring waveguide made of a material with a lower temperature coefficient of resonant frequency than silicon, such as silicon nitride, coupled with a micro-heater and micro-temperature sensor, allowing for precise temperature control and frequency locking of optical signals.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If silicon-based components are used in wavelength lockers, then the device can be manufactured with standard semiconductor processes, but the temperature coefficient of resonant frequency is high which limits frequency stability

Engineering Contradiction:
ImprovemanufacturabilityVSAvoidfrequency stability
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent employs a composite structure where a silicon nitride ring resonator is integrated with a silicon substrate containing the heater and temperature sensor. The silicon nitride waveguide provides low TCF for frequency stability while the silicon substrate enables standard semiconductor manufacturing processes. This composite approach resolves the contradiction between ease of manufacture and frequency stability.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The patent changes the material parameter (TCF) of the waveguide from silicon to silicon nitride. Silicon nitride has a significantly lower temperature coefficient of resonant frequency compared to silicon, which directly addresses the frequency stability issue while maintaining compatibility with standard fabrication processes through modified semiconductor manufacturing.

Inventive Principle:
Principle #35Parameter changes

2Device complexity

If standard silicon-based ring resonators are used, then the device structure is simple, but precise temperature control is difficult due to high temperature coefficient

Engineering Contradiction:
ImprovestructureVSAvoidtemperature control precision
Core Design Contradiction:
Device complexityVSMeasurement precision

Solution Approach 1:

The patent uses a composite material system where silicon nitride waveguides are fabricated on a silicon substrate. The silicon nitride provides thermal stability and low TCF, reducing the impact of temperature variations on resonant frequency. This material choice improves temperature control precision while maintaining a relatively simple integrated device structure that can be manufactured using standard semiconductor processes.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution provides enhanced temperature stability and tunability of laser frequencies, enabling precise control within ±1 GHz and reducing the need for stringent temperature control, thus improving the performance of wavelength lockers and tunable lasers.

Implementation Method 1

an integrated heater on the substrate

Methodology Applied
Scientific EffectJoule heating: Joule Heating

Implementation Method 2

an integrated silicon temperature sensor on the substrate

Methodology Applied
Scientific EffectTemperature sensing: Thermistor

Implementation Method 3

a ring waveguide of a first material disposed vertically between the integrated heater and the integrated silicon temperature sensor

Methodology Applied
Scientific EffectTotal internal reflection: Total Internal Reflection

Implementation Method 4

The resonance frequency of the ring resonator serves as a reference frequency. The frequency of a signal of interest can be compared to the reference frequency provided by the ring resonator.

Methodology Applied
Scientific EffectOptical resonance: Resonance

Data Source

PatentUS12078876B1Integrated wavelength selector
Publication Date: 2024.09.03 ACACIA TECH INC
  • US12078876B1 patent drawing
  • US12078876B1 patent drawing
  • US12078876B1 patent drawing

AI summary

Integrated wavelength selectors are described. The wavelength selector may include silicon nitride ring resonator disposed vertically between a heater and a temperature sensor. The temperature sensor may be formed of silicon in some embodiments. The wavelength selector may be coupled to the output port of a tunable laser, or may be disposed within a laser cavity.