Multi-Layer SiN Waveguide Optical Gyroscope Chip

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Solution Overview

Problem

Conventional fiber optical gyroscopes (FOGs) are large, expensive, and difficult to assemble due to the need for precise alignment of discrete optical components, making them challenging for volume production and integration into compact systems.

Innovation Solution

An integrated photonics optical gyroscope is fabricated on a silicon nitride (SiN) waveguide platform with a multi-layer configuration, where a first layer of SiN waveguides serves as a rotation sensing element and a second layer includes additional SiN waveguide-based optical components, allowing for hybrid integration of external elements like phase shifters and detectors, and enabling evanescent coupling between layers to minimize size and increase manufacturing scalability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If discrete optical components are used to construct fiber optical gyroscopes, then measurement precision is improved, but device complexity and assembly difficulty increase

Engineering Contradiction:
Improvemeasurement precisionVSAvoiddevice complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent integrates multiple discrete optical components (waveguides, phase shifters, detectors, lasers) onto a single silicon nitride chip platform. This merging eliminates the need for precise manual alignment of separate components while maintaining the interferometric measurement capability, thus resolving the contradiction between measurement precision and device complexity

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent transitions from a one-dimensional assembly of discrete components to a two-dimensional integrated chip layout. By arranging optical paths, phase shifters, and detectors in a planar configuration on the silicon nitride substrate, the system achieves compact integration without sacrificing measurement precision

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Measurement precision

If discrete optical components with precise alignment are used, then measurement precision is improved, but ease of manufacture deteriorates

Engineering Contradiction:
Improvemeasurement precisionVSAvoidease of manufacture
Core Design Contradiction:
Measurement precisionVSEase of manufacture

Solution Approach 1:

By combining all optical components into a single integrated chip, the patent eliminates complex alignment procedures required for discrete components. The unified structure allows for standardized fabrication processes and simplifies assembly, directly improving ease of manufacture while preserving measurement precision

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent replaces mechanical alignment of discrete components with monolithic integration on a silicon nitride chip. This substitution eliminates the need for manual positioning and mechanical adjustment, enabling scalable manufacturing through standard semiconductor fabrication techniques

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Device complexity

If multi-layer waveguide configuration is used, then device complexity is reduced, but manufacturing precision requirements increase

Engineering Contradiction:
Improvedevice complexityVSAvoidmanufacturing precision
Core Design Contradiction:
Device complexityVSManufacturing precision

Solution Approach 1:

The patent utilizes vertical layering of waveguides to achieve three-dimensional optical path routing on a two-dimensional chip. This approach reduces lateral complexity while the precise control of layer thickness and positioning during fabrication addresses manufacturing precision requirements through standardized semiconductor processes

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The multi-layer silicon nitride waveguide-based optical gyroscope achieves compactness, reduced weight, and lower production costs, facilitating mass production while maintaining high precision, essential for applications like autonomous vehicles and inertial measurement units.

Implementation Method 1

an integrated photonics optical gyroscope fabricated on a silicon nitride (SiN) waveguide platform comprises a first layer of silicon nitride (SiN) waveguides that constitute a rotation sensing element

Methodology Applied
Scientific EffectWaveguide: Waveguide (optics)

Implementation Method 2

The two portions can be stacked together to have a multi-layer configuration coupled with each other

Methodology Applied
Scientific EffectEvanescent coupling:

Implementation Method 3

Phase shifters can be of electro-optic materials such as lithium niobate or other polymers

Methodology Applied
Scientific EffectElectro-optic effect: Electro-Optic Effects

Implementation Method 4

By setting up an interferometric system, one can measure the small path length difference that is proportional to the area of the enclosed loop and the angular velocity of the rotating fiber coil

Methodology Applied
Scientific EffectInterference: Interference

Implementation Method 5

Optical gyroscopes typically have the highest performance and are based on interferometric measurements and the Sagnac effect

Methodology Applied
Scientific EffectSagnac effect: Sagnac Effect

Data Source

PatentUS11371842B2Multi-layer silicon nitride waveguide based integrated photonics optical gyroscope chip with electro-optic phase shifter
Publication Date: 2022.06.28 ANELLO PHOTONICS INC
  • US11371842B2 patent drawing
  • US11371842B2 patent drawing
  • US11371842B2 patent drawing

AI summary

An integrated photonics optical gyroscope fabricated on a silicon nitride (SiN) waveguide platform comprises a first silicon nitride (SiN) waveguide layer that constitute a rotation sensing element; and, a second SiN waveguide layer with additional silicon nitride (SiN) waveguide-based optical components that constitute a front-end chip to launch light into and receive light from the rotation sensing element. The two SiN waveguide layers can be stacked together to have a multi-layer configuration vertically coupled with each other. External elements (e.g., laser, detectors, phase shifter) may be made of different material platform than SiN and can be hybridly integrated to the SiN waveguide platform. The phase shifters can be made of lithium niobate or other electro optic material.