Silicon Optical Component with Micro Lens for Fiber Coupling

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Solution Overview

Problem

Current optical and electrical signaling and processing technologies require integration of optical and electrical components for efficient signal conversion and processing, but existing methods struggle to produce high-precision, cost-effective optical components for guiding light from optical fibers into photonic packages.

Innovation Solution

The development of silicon-based optical components that act as both mirrors and lenses, formed using semiconductor manufacturing techniques, which include micro lenses, anti-reflection coatings, and reflective coatings to enhance optical coupling efficiency and reduce manufacturing costs.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If traditional optical components (glass mirrors and lenses) are used to guide light from optical fibers into photonic packages, then optical coupling efficiency can be achieved, but the components become larger in size and more expensive to manufacture

Engineering Contradiction:
Improveoptical component precisionVSAvoidmanufacturing cost
Core Design Contradiction:
Manufacturing precisionVSEase of manufacture

Solution Approach 1:

The patent combines multiple optical functions (mirror reflection and lens focusing) into a single integrated silicon-based optical component. This merging eliminates the need for separate glass mirrors and lenses, reducing component count, manufacturing complexity, and cost while maintaining optical coupling efficiency through unified design and fabrication

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent replaces traditional mechanical/optical assembly of separate glass components with a semiconductor manufacturing process that directly fabricates the optical component on a silicon substrate. This substitution enables precise control of optical properties through material composition and geometric patterning rather than mechanical assembly, improving precision and reducing cost

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Reliability

If traditional glass mirror and lens components are used for light guidance, then optical coupling can be achieved, but the overall device size becomes larger

Engineering Contradiction:
Improveoptical coupling efficiencyVSAvoidoptical component size
Core Design Contradiction:
ReliabilityVSVolume of moving object

Solution Approach 1:

By merging mirror and lens functions into a single integrated component, the patent reduces the total volume occupied by optical elements. The unified structure eliminates gaps and alignment spaces required for separate components, achieving compact integration while maintaining optical coupling efficiency through coordinated surface geometries

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The silicon-based optical component performs multiple functions simultaneously - acting as both a mirror for light reflection and a lens for light focusing. This multi-functionality eliminates the need for separate dedicated mirror and lens components, significantly reducing the overall device volume while maintaining reliable optical coupling

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Manufacturing precision

If separate mirror and lens components are used, then light guidance can be achieved, but the device complexity and manufacturing steps increase

Engineering Contradiction:
Improveoptical component precisionVSAvoidcomponent structure complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent merges separate mirror and lens components into a single integrated structure fabricated on a silicon substrate. This consolidation reduces device complexity by eliminating multiple discrete parts, interfaces, and alignment requirements while maintaining manufacturing precision through unified fabrication processes that control both reflective and refractive surfaces

Inventive Principle:
Principle #5Merging (Combining)

4Reliability

If multiple separate optical components are used for light guidance, then optical functionality can be achieved, but manufacturing costs increase

Engineering Contradiction:
Improveoptical coupling efficiencyVSAvoidmanufacturing cost
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

By combining multiple optical components into a single integrated silicon-based device, the patent reduces manufacturing cost through economies of scale, simplified fabrication processes, and elimination of assembly operations. The unified structure maintains optical coupling efficiency while reducing the total number of manufacturing steps and quality control requirements

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent replaces traditional mechanical assembly of separate optical components with a semiconductor manufacturing approach that fabricates the entire optical system in an integrated circuit-like process. This substitution reduces manufacturing cost by enabling batch production, automated fabrication, and standardization while maintaining reliable optical performance

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

These silicon-based optical components enable efficient light guidance from optical fibers into photonic packages, achieving smaller sizes, higher precision, and reduced manufacturing costs, while acting as both mirrors and lenses within semiconductor packages.

Implementation Method 1

A micro lens structure is formed on the first side wall

Methodology Applied
Scientific EffectLens focusing: Lens

Implementation Method 2

a reflective coating is formed over the V-shaped groove

Methodology Applied
Scientific EffectLight reflection: Reflection

Implementation Method 3

anti-reflection coatings, and reflective coatings to enhance optical coupling efficiency

Methodology Applied
Scientific EffectAnti-reflection: Anti-Reflective Coating

Data Source

PatentUS20240411093A1Silicon-based optical component and method of forming the same
Publication Date: 2024.12.12 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US20240411093A1 patent drawing
  • US20240411093A1 patent drawing
  • US20240411093A1 patent drawing

AI summary

An optical component is provided. The optical component includes a silicon-based body including a bottom wall, a first side wall, a second side wall, and a micro lens structure. The first side wall is located on a first side of the silicon-based body and perpendicular to the bottom wall. The second side wall is located on a second side of the silicon-based body opposite to the first side, and forms an acute angle with the bottom wall. The micro lens structure is formed on the first side wall. The optical component further includes a protection layer formed over the first side wall and the micro lens structure.