Silicon Optical Modulator Irregular PN Junction

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Solution Overview

Problem

Conventional silicon optical modulators face a trade-off between modulation efficiency, working bandwidth, and optical loss, where improvements in one aspect often result in compromises in the others, limiting their performance in high-speed communication applications.

Innovation Solution

A silicon optical modulator based on a Mach-Zehnder interferometer structure with an irregular-shaped and prolonged PN-junction border line is developed, which enhances modulation efficiency and reduces optical loss by increasing the junction's charging capacity and shortening the modulator length, thereby achieving higher optical bandwidth.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the modulator length is increased to improve modulation efficiency, then the modulation efficiency is improved, but the optical loss increases

Engineering Contradiction:
Improvemodulation efficiencyVSAvoidoptical loss
Core Design Contradiction:
ReliabilityVSLoss of energy

Solution Approach 1:

The patent transforms the conventional straight PN-junction into a meandering or serpentine configuration, effectively increasing the junction border line length within the same modulator footprint. This dimensional transformation allows the electric field to interact with a longer portion of the optical mode without proportionally increasing the physical device length, thereby improving modulation efficiency while controlling optical loss.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The meandering PN-junction structure nests multiple segments of the junction border line within a compact modulator geometry. By folding and nesting the junction path, the effective interaction length is increased without proportionally increasing the overall device dimensions, resolving the trade-off between modulation efficiency and optical loss.

Inventive Principle:
Principle #7Nested doll (Nesting)

2Loss of energy

If the modulator length is decreased to reduce optical loss, then the optical loss is reduced, but the modulation efficiency decreases

Engineering Contradiction:
Improveoptical lossVSAvoidmodulation efficiency
Core Design Contradiction:
Loss of energyVSReliability

Solution Approach 1:

By transforming the junction geometry from a straight line to a meandering pattern, the patent packs more junction border line length into a shorter physical distance. This allows the modulator to achieve high modulation efficiency in a compact length, reducing optical loss while maintaining performance.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Reliability

If the PN-junction border line length is increased to enhance charging capacity, then the modulation efficiency is improved, but the device complexity increases

Engineering Contradiction:
Improvemodulation efficiencyVSAvoiddevice complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The meandering PN-junction is naturally segmented into multiple sections or segments along its path. This segmentation can be fabricated using standard lithography and doping processes, dividing the complex structure into manageable sections that are easier to manufacture while achieving the overall goal of increased border line length.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution results in a silicon optical modulator with higher modulation efficiency and reduced optical loss, enabling increased optical bandwidth and lower electrode microwave loss, thus addressing the limitations of existing modulators and supporting the growing demand for high-speed data transmission.

Implementation Method 1

silicon optical modulator is usually designed based on the in-direct EO effect in silicon, which is a free-carrier dispersion effect. Under free-carrier dispersion effect, the refractive index and absorption coefficient of doped silicon can be changed along with the concentration of free electron and holes

Methodology Applied
Scientific EffectFree-carrier dispersion effect: Electro-Optic Effects

Implementation Method 2

The changing of free-carriers concentration is realized by implanting a PN junction in a silicon waveguide so that when there is optical wave traveling through the waveguide, the optical parameters such as optical phase and optical intensity can be tuned by the external electrical field. Additionally, the refractive index change is utilized in a Mach-Zehnder interferometer structure having two waveguide branches with at least one of them being tunable in phase so as to convert the optical phase change to optical intensity change

Methodology Applied
Scientific EffectOptical interference: Interference

Data Source

PatentUS11686991B1Silicon optical modulator, method for making the same
Publication Date: 2023.06.27 MARVELL ASIA PTE LTD
  • US11686991B1 patent drawing
  • US11686991B1 patent drawing
  • US11686991B1 patent drawing

AI summary

A silicon optical modulator includes a silicon-on-insulator substrate and a first waveguide and a second waveguide arranged parallel to each other in the silicon-on-insulator substrate. The first waveguide includes a first PN junction. The second waveguide includes a second PN junction. At least one of the first PN junction and the second PN junction is disposed at an interface between a P type doped region and a N type doped region. The interface has an irregular shape that is not perpendicular to a plane in which the silicon-on-insulator substrate lies.