Silicon Optical Modulator Vertical Slabs Single Mask Fabrication
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Solution Overview
Problem
Conventional silicon-based optoelectronic modulators face challenges in efficiently forming optical modulator structures with vertical slabs, requiring multiple masks and separate etching processes, which can lead to inaccuracies and increased complexity.
Innovation Solution
The development of silicon-based optical modulator structures that incorporate a core region with refractive index modulation via electric charge, where a plurality of first and second vertical slabs are formed simultaneously using a single mask, providing a unified structure with equal heights and doping profiles to facilitate efficient charge injection and reduce optical signal losses.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If multiple masks and separate etching processes are used to form vertical slabs, then the fabrication process can accommodate complex structures, but the manufacturing complexity and process time increase
Solution Approach 1:
The patent combines multiple separate etching processes into a single etching step by using a unified mask structure that defines both the optical waveguide core region and the vertical slabs. This merging of processes reduces manufacturing complexity while maintaining the precision needed for forming accurate vertical slab structures alongside the core region.
Solution Approach 2:
The mask structure serves multiple functions simultaneously: it defines the optical waveguide core region, defines multiple vertical slabs, and provides alignment references for both structures. This multi-functionality eliminates the need for separate masks for each structure, reducing overall process complexity.
2Manufacturing precision
If vertical slabs are formed separately from the core region, then each component can be optimized independently, but the fabrication process becomes more complex and time-consuming
Solution Approach 1:
The patent forms the optical waveguide core region and vertical slabs in a single etching process using a unified mask, eliminating the need for separate formation steps. This simultaneous formation maintains manufacturing precision through consistent process conditions while significantly reducing total fabrication time.
Solution Approach 2:
The mask is designed in advance to pre-establish the relative positions and dimensions of both the core region and vertical slabs. This preliminary design ensures that when the single etching process is performed, both structures are formed with the correct geometry and spacing without requiring additional alignment or adjustment steps.
3Ease of manufacture
If conventional lateral slabs are used, then charge injection is achieved, but the influence of charges on the optical waveguide core region operation increases
Solution Approach 1:
The patent transitions from conventional lateral slabs (horizontal configuration) to vertical slabs (vertical configuration) that extend perpendicular to the optical waveguide core region. This dimensional change allows charge injection while reducing the lateral extent of charged regions near the core, thereby minimizing charge-induced effects on optical performance while maintaining ease of fabrication.
Solution Approach 2:
The patent uses multiple discrete vertical slabs instead of a single continuous lateral slab. This segmentation distributes the charge injection function across multiple separated structures, reducing the overall influence on the optical core while maintaining effective charge injection capability. The segmented approach also simplifies the mask design and etching process.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach simplifies the fabrication process, enhances the accuracy of forming optical modulators with vertical slabs, and reduces the influence of these slabs on the optical waveguide core, thereby improving the efficiency and reducing signal losses in the optical transmission.
Implementation Method 1
an optical waveguide core region for transmitting an optical signal
Implementation Method 2
a core region that comprises an optical transmission path having a refractive index that is modulated via electric charge introduced into the core region
Data Source
AI summary
An optical modulator structure can include a core region that comprises an optical transmission path having a refractive index that is modulated via electric charge introduced into the core region. A plurality of first vertical slabs comes into contact with and is spaced along a first side of the core region to provide a first path for the electric charge to/from the core region. A plurality of second vertical slabs come into contact with and is spaced along a second side of the core region, that is opposite to the first side, to provide a second path for the electric charge to/from the core region. Other structures and methods are disclosed.