Silicon Optomechanical Gyroscope Drift Reduction via Evanescent Coupling

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Current gyroscope technologies face a challenge in achieving high performance with low cost, as high-end gyroscopes are expensive and exhibit low drift, while consumer-grade MEMS gyroscopes suffer from high drift rates, making it difficult to develop three-axis gyroscopes with single-degree-per-hour drift for personal navigation.

Innovation Solution

The development of silicon photonic optomechanical gyroscopes using a ring resonator suspended by a central point, driven by evanescent coupling, which induces vibration in the disk to detect external motion, offering a low-cost navigation-grade performance by leveraging optomechanical forces and silicon photonics.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If high-end optical gyroscopes are used, then drift rate is reduced to a few degrees per hour or better, but cost increases to up to $1,000,000

Engineering Contradiction:
Improvedrift rateVSAvoidcost
Core Design Contradiction:
Measurement precisionVSEase of manufacture

Solution Approach 1:

The patent replaces traditional mechanical gyroscopes with optomechanical gyroscopes that use optical fields to drive mechanical vibrations. The optical drive mechanism substitutes for complex mechanical structures, enabling navigation-grade performance (drift rate of a few degrees per hour) to be achieved at lower cost through silicon photonic integration rather than expensive mechanical assembly

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the operating parameters by using optical resonance frequencies to drive mechanical modes at specific resonant frequencies. This parameter optimization allows the system to achieve high sensitivity and low drift rate comparable to high-end gyroscopes while using standardized silicon photonic manufacturing processes that reduce cost

Inventive Principle:
Principle #35Parameter changes

2Ease of manufacture

If consumer-grade MEMS gyroscopes are used, then cost is reduced to about $1 per axis, but drift rate increases to 50-100 degrees per hour

Engineering Contradiction:
ImprovecostVSAvoiddrift rate
Core Design Contradiction:
Ease of manufactureVSMeasurement precision

Solution Approach 1:

The patent replaces electrostatic MEMS actuation with optomechanical actuation. The optical drive mechanism provides more precise control over mechanical vibrations, enabling drift rates in the single degrees per hour range while maintaining the low-cost silicon photonic manufacturing approach that produces consumer-grade devices

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent utilizes mechanical vibration at resonant frequencies to enhance the sensitivity and precision of the gyroscope. By driving the mechanical mode at its resonant frequency using optical forces, the system achieves navigation-grade drift performance while maintaining the simplicity and low cost of integrated silicon photonic fabrication

Inventive Principle:
Principle #18Mechanical vibration

3Ease of manufacture

If electrostatic MEMS gyroscopes are used, then cost is reduced, but drift rate remains in the single degrees per hour range which is insufficient for personal navigation

Engineering Contradiction:
ImprovecostVSAvoiddrift rate
Core Design Contradiction:
Ease of manufactureVSMeasurement precision

Solution Approach 1:

The patent substitutes electrostatic MEMS with optomechanical systems where optical fields provide the driving force. This substitution enables achievement of sub-degree-per-hour drift rates necessary for personal navigation while maintaining cost-effectiveness through integrated silicon photonic manufacturing that avoids expensive specialized processes

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables high-performance gyroscopes with reduced drift rates, achieving navigation-grade sensitivity and bandwidth at a lower cost, bridging the gap between high-end and consumer-grade devices.

Implementation Method 1

An optical resonance is excited in the ring by evanescent coupling from an adjacent waveguide

Methodology Applied
Scientific EffectEvanescent coupling:

Implementation Method 2

the disk is driven into vibration due to optomechanical forces (either radiation pressure or optical gradient force)

Methodology Applied
Scientific EffectOptomechanical forces: Radiation Pressure

Implementation Method 3

The mode of vibration is perturbed in proportion to the external acceleration (in the case of an accelerometer) or rotation (or Coriolis acceleration, in the case of a gyroscope)

Methodology Applied
Scientific EffectCoriolis acceleration: Coriolis Force

Data Source

PatentUS9482535B2Integrated silicon optomechanical gyroscopes (OMGs)
Publication Date: 2016.11.01 INTEL CORP
  • US9482535B2 patent drawing
  • US9482535B2 patent drawing
  • US9482535B2 patent drawing

AI summary

A system having an optomechanical gyroscope device. An optomechanical disk acts as an optical ring resonator and a mechanical disk resonator. A drive laser generates an optical drive signal. A drive channel acts as a waveguide for the optical drive signal and includes drive electrodes in a first proximity with respect to the optomechanical disk. The drive electrodes to excite the ring by evanescent coupling. A drive photodetector is configured to receive an output optical signal from the drive channel. A sense laser generates a optical sense signal. A sense channel acts as a waveguide for the optical sense signal and includes sense electrodes in a second proximity with respect to the optomechanical disk. A sense photodetector is configured to receive an output optical signal from the sense channel.