Silicon Oxide Electret Electrode Laminate Insulating Film
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Solution Overview
Problem
Conventional static induction vibration power generators using silicon oxide films as electret materials face limitations in increasing film thickness due to internal stress, leading to low power generation efficiency due to restricted surface potential and charge density.
Innovation Solution
An electret electrode structure is developed with a conductive film, a silicon oxide film, and insulating films laminated to increase the distance between the electric charge retention regions and the conductive film, enhancing surface potential and charge density, while also improving moisture resistance and stability through complete coverage of the silicon oxide film with insulating layers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If the film thickness of the silicon oxide film is increased to increase surface electric charge density, then the power generation amount increases, but cracks and substrate warp occur due to internal stress
Solution Approach 1:
The patent divides the single thick silicon oxide film into multiple thinner silicon oxide films separated by organic insulating films. This segmentation reduces the internal stress accumulated in each individual silicon oxide layer, preventing cracks and substrate deformation while maintaining the total thickness needed for high surface electric charge density and power generation output.
Solution Approach 2:
The patent creates a composite structure combining multiple silicon oxide films with organic insulating films (such as polyimide or acrylic resin). This composite approach allows the silicon oxide layers to retain their piezoelectric properties for power generation while the organic layers provide stress relief and flexibility, preventing structural failures.
2Productivity
If the film thickness of the silicon oxide film is increased to increase surface potential, then the power generation efficiency improves, but manufacturing complexity increases due to stress control
Solution Approach 1:
By segmenting the thick film into multiple thin layers, the patent simplifies the manufacturing process. Each thin silicon oxide layer can be deposited using standard thin-film techniques without requiring excessive stress management, making the overall manufacturing more controllable and less complex despite achieving higher total thickness.
Solution Approach 2:
The patent changes the structural parameters from a single continuous layer to multiple discrete layers with intermediate organic films. This parameter change allows standard thin-film deposition parameters to be used for each layer, avoiding the need for specialized thick-film deposition processes and simplifying manufacturing.
3Quantity of substance
If a thick silicon oxide film is used as electret material, then charge retention capacity increases, but moisture resistance decreases leading to charge discharge
Solution Approach 1:
The patent creates a composite structure where hydrophobic organic insulating films (such as polyimide or acrylic resin) are integrated between silicon oxide layers. These organic materials provide moisture barrier properties, protecting the charge-retaining silicon oxide layers from moisture-induced charge discharge while maintaining the total thickness needed for high charge retention capacity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The enhanced electret electrode structure significantly increases surface potential and charge density, improving power generation efficiency and allowing for higher output power in vibration power generators, with the added benefit of stabilized electric charge retention and reduced need for battery replacement in communication devices.
Implementation Method 1
an electric charge is applied to one electrode of a variable capacity and the electric charge is induced to an opposed electrode through electrostatic induction
Implementation Method 2
an insulating film including a laminate. the laminate has a first insulating film and a second insulating film laminated between the conductive film and the silicon oxide film
Data Source
AI summary
An electret electrode is constituted by forming a conductive film on a substrate, laminating a first insulating film and a second insulating film alternatively on the conductive film, and then disposing electret films in which a lower surface, an upper surface and a side surface are covered with a third insulating film and a fourth insulating film. Existing of the first insulating film and the second insulating film between the electret films and the conductive film enables an increase in electric field intensity in the film when the same electric charge is retained, while enables an increase in surface charge density (surface potential) when the electric field intensity is the same.