Silicon Photonics Staircase Substrate for Low-Loss Fiber Coupling
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Solution Overview
Problem
Current silicon photonics products face challenges in effectively reducing the distance between waveguides and optical fiber devices, leading to signal loss.
Innovation Solution
A silicon photonics structure with a substrate having a staircase configuration and a waveguide on a wider first side, along with a manufacturing method involving precise etching processes to form openings and a staircase structure, allowing for reduced distance between the waveguide and optical fiber device.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of energy
If the distance between waveguide and optical fiber device is reduced, then optical signal loss is minimized, but manufacturing complexity increases due to precise positioning requirements
Solution Approach 1:
The patent introduces a vertical dimension by creating a staircase structure with multiple levels on the substrate. This allows the waveguide to be positioned at different heights relative to the optical fiber device, enabling close coupling while maintaining manufacturability through standardized etching processes rather than requiring precise lateral positioning alone.
Solution Approach 2:
The substrate is divided into multiple stepped levels, creating a segmented structure that facilitates progressive positioning of the waveguide and optical fiber device. This segmentation allows for modular assembly and reduces the overall complexity by breaking down the positioning challenge into manageable discrete steps.
2Manufacturing precision
If precise etching processes are used to form staircase structure, then waveguide positioning accuracy is improved, but manufacturing time and cost increase
Solution Approach 1:
The manufacturing process employs periodic etching actions to create the staircase structure, where each step is formed through repeated cycles of etching and masking. This periodic approach allows for controlled, incremental formation of each level, ensuring positioning accuracy while maintaining systematic process flow that can be optimized for production efficiency.
Solution Approach 2:
The staircase structure is prepared in advance through preliminary etching processes before final waveguide fabrication. This preliminary action establishes the positioning framework early in the manufacturing sequence, allowing subsequent steps to proceed more efficiently with pre-defined reference structures already in place.
Data Source
AI summary
A silicon photonics structure including a silicon photonics device is provided. The silicon photonics device includes a substrate and a waveguide. The substrate has a first side and a second side opposite to each other, and the waveguide is located on the first side. The width of the first side is greater than the width of the second side. The substrate includes a staircase structure.