Silicon Photonics Wafer Packaging with Known-Good Die Testing

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Solution Overview

Problem

Current silicon photonics manufacturing and packaging techniques face challenges in integrating high-speed, high-bandwidth optical transceivers with compact package footprints, particularly in wafer processing, electrical and optical testing, and module assembly, which are inadequate for meeting the increasing demands of modern data communication systems.

Innovation Solution

A method for manufacturing and packaging silicon photonics wafer products that involves fabricating silicon photonics integrated circuits on a silicon-on-insulator wafer, conducting wafer-level testing, and performing post-wafer processing to create known-good-wafers for custom optical-electrical modules, including flip-bonding functional chips and aligning fiber arrays for light coupling, enabling efficient assembly of optical-electrical modules.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If traditional cable communication is used, then the system is simple and cost-effective, but the bandwidth and transmission speed are limited and cannot accommodate mass information transmission

Engineering Contradiction:
Improvesystem simplicityVSAvoidbandwidth and transmission speed
Core Design Contradiction:
Ease of manufactureVSProductivity

Solution Approach 1:

The patent replaces traditional electrical cable communication with optical fiber communication, substituting electrical signal transmission with optical signal transmission. This allows mass information transmission through optical carriers, achieving high bandwidth and transmission speed while overcoming the limitations of traditional cable systems

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent transitions from electrical domain to optical domain by changing the fundamental transmission parameter from electrical signals to optical signals. This parameter change enables higher bandwidth utilization and faster transmission speeds through optical fiber media, directly addressing the bandwidth limitations of traditional cable communication

Inventive Principle:
Principle #35Parameter changes

2Adaptability or versatility

If optical components are integrated on silicon substrates to fabricate large-scale silicon photonics integrated circuits, then the integration density and functionality increase, but the manufacturing complexity and testing difficulty increase

Engineering Contradiction:
Improveintegration density and functionalityVSAvoidmanufacturing and testing complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent combines multiple photonic components (lasers, modulators, detectors, waveguides) and electronic components into a single silicon photonics integrated circuit on a silicon substrate. This integration consolidates multiple discrete components into one unified device, achieving high integration density while managing complexity through systematic design and fabrication processes

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The silicon photonics integrated circuit serves multiple functions simultaneously - optical signal generation, modulation, transmission, and detection - all within a single device platform. This multi-functionality approach allows the system to perform complex optical communication tasks while maintaining a compact integrated structure

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Area of stationary object

If all necessary components are integrated within smaller silicon photonics chips to decrease package footprint, then the compactness increases, but the manufacturing and testing challenges in wafer level increase

Engineering Contradiction:
Improvepackage footprintVSAvoidwafer processing and testing ease
Core Design Contradiction:
Area of stationary objectVSEase of manufacture

Solution Approach 1:

The patent segments the integration process into distinct phases: wafer-level fabrication of multiple identical circuit patterns, wafer-level testing of arrays of chips, and subsequent packaging. This segmentation allows standardized mass production of compact circuits while managing testing complexity through automated wafer-level processes before final packaging

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent transitions from individual chip processing to wafer-level processing, adding the dimension of parallel manufacturing. By fabricating and testing multiple identical circuit patterns simultaneously on a single wafer, the system achieves compact package footprints while managing manufacturing complexity through high-volume parallel processing

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

4Reliability

If wafer-level testing is implemented to identify known-good-wafers, then the quality control and yield improve, but the processing time and cost increase

Engineering Contradiction:
Improvequality control and yieldVSAvoidprocessing time
Core Design Contradiction:
ReliabilityVSLoss of time

Solution Approach 1:

The patent performs comprehensive electrical and optical testing at the wafer level before dicing individual chips, identifying known-good-wafers and known-good-dies in advance. This preliminary quality control prevents defective chips from proceeding to subsequent packaging and assembly steps, improving overall yield while managing time through efficient automated testing processes

Inventive Principle:
Principle #10Preliminary action

Data Source

PatentUS11837509B1Method of manufacturing and packaging silicon photonics integrated circuit dies in wafer form
Publication Date: 2023.12.05 MARVELL ASIA PTE LTD
  • US11837509B1 patent drawing
  • US11837509B1 patent drawing
  • US11837509B1 patent drawing

AI summary

A method of packaging the silicon photonics wafer for fabricating custom optical-electrical modules includes fabricating a wafer with multiple dies of silicon photonics circuits based on custom design and conducting electrical and optical tests of the silicon photonics circuits in wafer level. The method further includes preparing the wafer for next point of use. Additionally, the method includes performing post-wafer processing on the wafer received at the next point of use. The method further includes conducting post-process electrical tests of the silicon photonics circuits in wafer level. Furthermore, the method includes preparing the wafer with known-good-dies or a known-good-wafer identified for custom use. Moreover, the method includes performing custom process on the know good dies.