Silicon Resonator Partial Oxidation for High Q Factor
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Solution Overview
Problem
Electromechanical gyroscopes using silicon resonators have a relatively low quality factor (Q factor), which limits their performance compared to resonators made from materials like quartz or fused silica, and existing processes for forming these resonators are costly and complex.
Innovation Solution
A silicon substrate is etched to form a resonator structure, which is then partially oxidized to increase the Q factor, with an unoxidized interior portion forming a thin conductive core, allowing for improved energy storage and reduced energy loss.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If silicon resonators are used instead of quartz or fused silica, then manufacturing cost is reduced and ease of manufacture is improved, but the quality factor (Q factor) deteriorates
Solution Approach 1:
The patent creates a composite structure by forming an oxide layer on the silicon resonator surface. This composite material approach combines the manufacturing advantages of silicon with the high Q-factor properties of oxide materials, achieving both low cost and high performance.
Solution Approach 2:
The patent changes the physical and chemical parameters of the silicon resonator by oxidizing its surface. This parameter change transforms the surface properties to achieve higher Q-factor while maintaining the bulk silicon structure that enables easy manufacturing.
2Loss of energy
If the resonator beam is fully oxidized to increase Q factor, then energy storage is improved, but the conductive core is lost and additional external coatings are required
Solution Approach 1:
The patent applies partial oxidation rather than complete oxidation of the resonator beam. This partial action is sufficient to achieve the desired Q-factor improvement while preserving the conductive core, avoiding the need for additional external coatings and simplifying the overall device structure.
Solution Approach 2:
The patent creates local quality differentiation within the resonator beam by oxidizing only the outer portions while leaving the interior conductive core unoxidized. This localized approach optimizes both energy storage and electrical conductivity in different regions of the same structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The process enhances the Q factor of silicon resonators, making them perform closer to those made from higher Q factor materials like fused silica, while maintaining low-cost manufacturing processes, and reduces energy loss through the use of a thin conductive core instead of external coatings.
Implementation Method 1
The resonator structure includes at least one resonator beam oxidized at an outer portion to increase a quality factor (Q factor) of the resonator structure
Data Source
AI summary
A resonator and method of making a resonator are provided. A particular method includes etching a silicon substrate to form a resonator structure. The resonator structure includes at least one resonator beam. The method also includes converting at least a portion of the at least one resonator beam to dry oxide.