Dielectric-Filled Silicon RF Substrate for Lower Signal Loss

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Solution Overview

Problem

Conventional semiconductor materials used in RF antenna systems for wireless devices suffer from high electromagnetic energy dissipation, leading to reduced radiation efficiency and limited bandwidth, especially in high-frequency applications.

Innovation Solution

The development of a package assembly with a structured silicon substrate featuring cavities filled with dielectric material and RF elements embedded within an insulating layer, reducing radiation loss by isolating RF components from the lossy substrate.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of energy

If conventional semiconductor materials are used for substrate, then device integration is achieved, but electromagnetic energy dissipation increases

Engineering Contradiction:
Improveelectromagnetic energy dissipationVSAvoidradiation efficiency
Core Design Contradiction:
Loss of energyVSReliability

Solution Approach 1:

The substrate is segmented into distinct regions: a first substrate region and a second substrate region with different material compositions. The first region uses conventional semiconductor material for device integration, while the second region uses low-loss dielectric material for RF antenna support, thereby separating the functions and reducing overall energy dissipation.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the substrate are assigned different material properties tailored to their specific functions. The first substrate region has properties suitable for semiconductor device integration, while the second substrate region has low-loss dielectric properties optimized for RF antenna performance, ensuring each area has the appropriate local quality for its purpose.

Inventive Principle:
Principle #3Local quality

2Productivity

If conventional semiconductor materials are used, then manufacturing is simplified, but bandwidth is limited

Engineering Contradiction:
Improvemanufacturing simplicityVSAvoidbandwidth
Core Design Contradiction:
ProductivityVSAdaptability or versatility

Solution Approach 1:

The substrate is divided into functional regions with different materials. The first region maintains conventional semiconductor properties for manufacturing compatibility, while the second region introduces low-loss dielectric material to extend bandwidth capabilities for RF applications.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The substrate employs a composite structure combining conventional semiconductor material and low-loss dielectric material in a single integrated platform, allowing the system to benefit from both the manufacturing advantages of conventional materials and the performance advantages of low-loss materials for RF antennas.

Inventive Principle:
Principle #40Composite materials

3Device complexity

If RF elements are placed close to semiconductor devices, then integration density increases, but signal loss increases

Engineering Contradiction:
Improveintegration densityVSAvoidsignal loss
Core Design Contradiction:
Device complexityVSLoss of energy

Solution Approach 1:

The substrate is segmented into a first region for semiconductor devices and a second region for RF antennas, physically separating the two functional areas while maintaining integration on a single substrate. This reduces signal loss by isolating RF elements from the lossy semiconductor material.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

A low-loss dielectric material is introduced as an intermediary substrate region between the semiconductor devices and RF antenna elements, serving as a mediator that allows close integration while minimizing electromagnetic energy dissipation and signal loss.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances radiation efficiency and bandwidth by minimizing signal loss, enabling the integration of high-frequency RF elements with improved performance in compact wireless devices.

Implementation Method 1

an insulating layer disposed over the first surface, the second surface, the first cavity wall, and the via wall; an electrical interconnection disposed within the via, wherein the insulating layer is disposed between the via wall and the electrical interconnection

Methodology Applied
Scientific EffectElectromagnetic insulation: Dielectric

Implementation Method 2

a package assembly with a structured silicon substrate featuring cavities filled with dielectric material and RF elements embedded within an insulating layer, reducing radiation loss by isolating RF components from the lossy substrate

Methodology Applied
Scientific EffectDielectric property: Dielectric

Data Source

PatentUS12051653B2Reconstituted substrate for radio frequency applications
Publication Date: 2024.07.30 APPLIED MATERIALS INC
  • US12051653B2 patent drawing
  • US12051653B2 patent drawing
  • US12051653B2 patent drawing

AI summary

The present disclosure relates to methods and apparatus for forming thin-form-factor reconstituted substrates and semiconductor device packages for radio frequency applications. The substrate and package structures described herein may be utilized in high-density 2D and 3D integrated devices for 4G, 5G, 6G, and other wireless network systems. In one embodiment, a silicon substrate is structured by laser ablation to include cavities for placement of semiconductor dies and vias for deposition of conductive interconnections. Additionally, one or more cavities are structured to be filled or occupied with a flowable dielectric material. Integration of one or more radio frequency components adjacent the dielectric-filled cavities enables improved performance of the radio frequency elements with reduced signal loss caused by the silicon substrate.