Silicon Rib Waveguide Polarization Rotator

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Solution Overview

Problem

Conventional polarization rotators using silicon waveguides require additional processing steps for silicon nitride layers, increasing fabrication complexity and time, and have tight fabrication tolerances due to small feature sizes, which complicates their integration into optical integrated circuits.

Innovation Solution

A polarization rotator design that utilizes only silicon waveguides, eliminating the need for silicon nitride layers and incorporating a rib waveguide structure with tapered peripheral cores to achieve polarization conversion, allowing for more relaxed fabrication tolerances and reduced circuit length.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If silicon nitride layers are added to achieve polarization rotation, then polarization conversion is enabled, but fabrication complexity and processing time increase

Engineering Contradiction:
Improvepolarization conversionVSAvoidfabrication complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The invention extracts and removes the silicon nitride layer from the polarization rotator structure, retaining only the silicon waveguide. The polarization rotation function is achieved through the intrinsic properties of the silicon waveguide itself, eliminating the need for additional silicon nitride deposition and processing steps while maintaining the core functionality.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The silicon waveguide is designed to perform multiple functions: guiding light and enabling polarization rotation. By making the silicon waveguide itself capable of polarization conversion through its geometric configuration rather than requiring separate functional layers, the device achieves multi-functionality with a single material system, reducing fabrication complexity.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Reliability

If silicon nitride layers are used for polarization rotation, then polarization conversion is achieved, but fabrication time increases

Engineering Contradiction:
Improvepolarization conversionVSAvoidfabrication time
Core Design Contradiction:
ReliabilityVSLoss of time

Solution Approach 1:

The silicon nitride layer is completely removed from the fabrication process. The polarization rotator is fabricated using only standard silicon waveguide processing steps, eliminating the time-consuming silicon nitride deposition, patterning, and etching operations while achieving the same polarization conversion function through the silicon waveguide's geometric design.

Inventive Principle:
Principle #2Taking out (Extraction)

3Volume of moving object

If small feature sizes are used to reduce circuit size, then integration density improves, but fabrication tolerance becomes tighter

Engineering Contradiction:
Improvecircuit sizeVSAvoidfabrication tolerance
Core Design Contradiction:
Volume of moving objectVSManufacturing precision

Solution Approach 1:

The invention changes the design parameters of the silicon waveguide, specifically using a rib waveguide structure with optimized dimensions. The waveguide width is set to 3 μm and height to 220 nm, with a ridge width of 1 μm. These parameter choices balance miniaturization with fabrication tolerance, allowing compact circuit integration while maintaining manufacturability with standard fabrication processes.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enables efficient polarization conversion without additional processing steps, reduces fabrication complexity, and improves tolerance in waveguide arrangement, making the polarization rotator more cost-effective and easier to integrate into optical circuits.

Implementation Method 1

a polarization converter including a silicon rib waveguide and configured to convert TM-polarized basic mode light into TE-polarized first mode light

Methodology Applied
Scientific EffectPolarization conversion: Polarisation

Data Source

PatentEP3115813B1Polarization rotator
Publication Date: 2020.02.26 NIPPON TELEGRAPH & TELEPHONE CORP
  • EP3115813B1 patent drawingFigure 1
  • EP3115813B1 patent drawingFigure 2
  • EP3115813B1 patent drawingFigure 3

AI summary

Polarization rotators of conventional techniques require forming a silicon nitride layer, which is not employed in usual fabrication of a silicon waveguide circuit. In order to employ a polarization rotator function in an optical integrated circuit, a process of forming a silicon nitride layer is added just for that purpose. This increases the fabrication time and complicates the fabrication equipment. In a polarization rotator of the present invention, the waveguide width of a center core portion of a polarization converter (104) is made small. Thus, the intensity of an optical wave does not concentrate only at the center core portion and is more influenced by structural asymmetry. With the configuration of the polarization rotator of the present invention, it is possible to efficiently cause polarization conversion with a structure including only a silicon waveguide and no silicon nitride layer or the like formed thereon.