Silicon Ring Modulator Grating Pillars for Lower Electrical Resistance

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Solution Overview

Problem

The electrical resistance in silicon ring modulators limits the bandwidth of optical communication systems, hindering high-speed data transmission.

Innovation Solution

Incorporation of grating pillars with varying doping concentrations and orientations within the silicon photonics modulator structure to reduce electrical resistance without increasing footprint or decreasing fabrication tolerance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If the electrical resistance in silicon ring modulators is reduced, then the bandwidth of optical communication systems is improved, but the device complexity increases due to the need for grating pillars with varying doping concentrations

Engineering Contradiction:
ImprovebandwidthVSAvoiddevice complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The substrate is divided into multiple regions with different doping concentrations (first plurality of regions with p-type doping, second plurality of regions with n-type doping), and grating pillars are segmented and placed in specific regions to reduce electrical resistance while maintaining device functionality

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the substrate are assigned different doping concentrations and types (p-type or n-type) based on local requirements, with grating pillars strategically positioned in regions where they can most effectively reduce electrical resistance without interfering with the PN junction operation

Inventive Principle:
Principle #3Local quality

2Productivity

If grating pillars are added to reduce electrical resistance, then the bandwidth is enhanced, but the manufacturing precision requirements increase

Engineering Contradiction:
ImprovebandwidthVSAvoidmanufacturing precision
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The grating pillars are formed and doped before the PN junction is fully assembled, allowing the doping concentrations to be established in advance in the substrate regions where grating pillars will be placed, simplifying the overall manufacturing process

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The doping concentrations in the substrate regions are varied as a key parameter to optimize electrical resistance, with specific concentration levels assigned to different regions adjacent to the PN junction to achieve the desired electrical characteristics

Inventive Principle:
Principle #35Parameter changes

3Object-generated harmful factors

If multiple regions with different doping concentrations are created, then the electrical resistance is reduced, but the ease of manufacture decreases

Engineering Contradiction:
Improveelectrical resistanceVSAvoidease of manufacture
Core Design Contradiction:
Object-generated harmful factorsVSEase of manufacture

Solution Approach 1:

The substrate is segmented into distinct regions (first plurality of regions with p-type doping, second plurality of regions with n-type doping) that can be processed separately, allowing each region to be optimized for its specific function while maintaining overall manufacturability

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The grating pillars lower electrical resistance, enhancing the bandwidth and speed of data transmission in optical communication devices.

Implementation Method 1

The electrical resistance in silicon ring modulators limits the bandwidth of optical communication systems

Methodology Applied
Scientific EffectElectrical Resistance: Electrical Resistance

Implementation Method 2

A high-speed silicon modulator is a key component in an optical network. The optical modulator converts an electrical signal to the modulated optical signal

Methodology Applied
Scientific EffectElectroluminescence: Electroluminescence

Data Source

PatentUS12436416B1Optics ring modulator including grating pillar
Publication Date: 2025.10.07 MARVELL ASIA PTE LTD
  • US12436416B1 patent drawing
  • US12436416B1 patent drawing
  • US12436416B1 patent drawing

AI summary

A silicon photonics modulator includes a substrate, a PN junction disposed on the substrate, the PN junction formed by a first L-shaped region doped with a p-type doping abutting a second L-shaped region doped with an n-type doping, a first plurality of regions each having different p-type doping concentrations greater than the first L-shaped region, and a second plurality of regions each having different n-type doping concentrations greater than the second L-shaped region. The silicon photonics modulator includes a first electrical contact on one of the first plurality of regions, a second electrical contact on one of the second plurality of regions, and multiple grating pillars doped with the n-type doping or the p-type doping, each of the multiple grating pillars spaced apart from the PN junction and spaced apart from one another.