Polycrystalline Silicon Rod Handling to Prevent Carbon Contamination

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Solution Overview

Problem

Carbon contamination of the surface of polycrystalline silicon rods during handling is a significant issue due to direct contact with carbon members or fragments falling off during handling processes, which existing methods fail to adequately address.

Innovation Solution

The method involves covering the carbon member at the end of the polycrystalline silicon rod with a resin covering member, such as a polyethylene film or bag, to isolate it from the rod, and removing the carbon member while covered to prevent contamination.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If the carbon member is removed from the polycrystalline silicon rod inside the reactor, then the carbon member can be separated from the rod, but carbon fragments scatter and contaminate the reactor and rod surface

Engineering Contradiction:
Improvecarbon member separationVSAvoidcarbon contamination
Core Design Contradiction:
Ease of manufactureVSObject-affected harmful factors

Solution Approach 1:

The carbon member is covered with a covering member before removal to prevent carbon fragmentation and scattering. This preliminary protective action ensures that when the carbon member is detached, no carbon fragments can contaminate the rod surface or reactor environment.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

A covering member acts as an intermediary between the carbon member and the polycrystalline silicon rod. This intermediate element prevents direct contact and contamination while allowing the carbon member to be removed from the rod.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Object-affected harmful factors

If the polycrystalline silicon rod is covered with a plastic bag after reactor formation, then the rod surface is protected from contamination, but the carbon member inside the bag still causes carbon contamination when carried

Engineering Contradiction:
Improvesurface contamination protectionVSAvoidcarbon contamination
Core Design Contradiction:
Object-affected harmful factorsVSObject-generated harmful factors

Solution Approach 1:

The carbon member is extracted from the plastic bag covering, separating it from the polycrystalline silicon rod. By removing the carbon member before sealing the rod in the plastic bag, the harmful carbon contamination source is eliminated while maintaining the protective covering.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The covering member serves as an intermediary that allows the carbon member to be separated from the rod while maintaining protection during handling. The covering member enables the rod to be protected during transport without the carbon member being able to contaminate the surface.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Ease of operation

If the carbon member is allowed to contact the polycrystalline silicon rod surface during handling, then the rod can be easily manipulated, but carbon adheres to the rod surface causing contamination

Engineering Contradiction:
Improverod handlingVSAvoidcarbon contamination
Core Design Contradiction:
Ease of operationVSObject-affected harmful factors

Solution Approach 1:

The covering member acts as an intermediary between the handler and the rod surface. This intermediate layer allows for easy manipulation of the rod while preventing carbon fragments from adhering to the rod surface during handling operations.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

A flexible covering member or thin film is used to wrap the rod during handling. This flexible barrier allows the rod to be manipulated while preventing direct contact between carbon fragments and the rod surface, thus avoiding contamination.

Inventive Principle:
Principle #30Flexible shells and thin films

Data Source

PatentEP3578514B1Method for producing polycrystalline silicon processed article
Publication Date: 2025.12.31 TOKUYAMA CORP
  • EP3578514B1 patent drawingFigure 1
  • EP3578514B1 patent drawingFigure 2
  • EP3578514B1 patent drawingFigure 3(a)~3(c)

AI summary

[Problem] To provide a novel method for producing a polycrystalline silicon processed article, the method including a step for preventing carbon contamination of a polycrystalline silicon rod surface by a carbon member present on the polycrystalline silicon rod end portion when handling a polycrystalline silicon rod obtained by the Siemens method. [Solution] Provided is a method for producing a polycrystalline silicon processed article, the method being characterized in that, in a method for removing a polycrystalline silicon rod obtained by precipitating polycrystalline silicon on a silicon core wire held by a carbon member connected to an electrode in a reactor by the Siemens method in a state in which the carbon member is included at the end portion thereof and processing the polycrystalline silicon rod, there is included a step for detaching the polycrystalline silicon rod from the electrode and covering the carbon member present on the end portion of the polycrystalline silicon rod using a covering material until processing, whereby the polycrystalline silicon rod and the carbon member are handled in a separated state.