Silicon Trace Metal Analysis Using Zone-Melt Drop Concentration

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Solution Overview

Problem

Existing methods for determining metallic impurities in silicon, such as INAA and freeze-tip methods, suffer from high costs, complex instrumentation, long analysis times, low recovery rates, and contamination issues, making them unsuitable for routine and efficient analysis.

Innovation Solution

A method involving zone melting with a reversed movement of the silicon sample and seed crystal to form a conical end region, followed by cooling and partial dissolution of a solidified silicon drop, allowing for high recovery rates and reduced contamination, using a controlled etching process to analyze the impurities.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If instrumental neutron activation analysis (INAA) is used to determine metallic impurities, then detection limits are very low (≤50 pg/g for Fe, Cr, Ni), but the analysis duration is very long (2 to 3 months) and the cost is very high

Engineering Contradiction:
Improvedetection limitVSAvoidanalysis duration
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The invention applies preliminary action by performing zone melting to concentrate impurities into a small volume (the solidified drop) before analysis. This pre-concentration step enables rapid analysis with low detection limits, eliminating the need for long INAA measurement periods while achieving comparable or better sensitivity.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The invention changes the physical state and concentration parameters of the sample by melting silicon and concentrating impurities into a small solidified drop. This parameter change from bulk analysis to concentrated drop analysis enables both low detection limits and rapid analysis times.

Inventive Principle:
Principle #35Parameter changes

2Productivity

If the freeze-tip method is used to concentrate and analyze metallic impurities, then analysis time is reduced to less than a week, but the recovery rate of impurities is low and contamination occurs during mechanical separation

Engineering Contradiction:
Improveanalysis timeVSAvoidrecovery rate
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

The invention extracts impurities from the bulk silicon by concentrating them into a separate solidified drop through controlled zone melting. This extraction eliminates the need for mechanical separation that causes contamination and loss, achieving both high recovery rates and fast analysis.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

Instead of mechanically separating and then analyzing impurities as in the freeze-tip method, the invention inverts the approach by first concentrating impurities into a solidified drop through controlled freezing, then analyzing the drop without mechanical separation. This inversion eliminates contamination while maintaining fast analysis.

Inventive Principle:
Principle #13The other way round (Inversion)

3Measurement precision

If zone melting is used to concentrate impurities, then detection limits are improved, but the process complexity and instrumentation requirements increase

Engineering Contradiction:
Improvedetection limitVSAvoidinstrumentation complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The invention uses a simple, disposable solidified drop containing concentrated impurities instead of complex, expensive instrumentation. The drop serves as a temporary, single-use sample preparation that enables sensitive detection with minimal equipment, replacing costly INAA or complex ICP-MS setups.

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

4Productivity

If complete dissolution of silicon sample is performed to analyze impurities, then analysis time is short (1 to 2 days), but detection limits are 100 times greater than INAA due to lack of concentration

Engineering Contradiction:
Improveanalysis timeVSAvoiddetection limit
Core Design Contradiction:
ProductivityVSMeasurement precision

Solution Approach 1:

The invention performs preliminary concentration of impurities into a small solidified drop before dissolution and analysis. This pre-concentration enables both rapid analysis and low detection limits by ensuring impurities are concentrated in a small volume that dissolves quickly but maintains high impurity concentration for sensitive detection.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Achieves high recovery rates of up to 95% of metallic impurities in a solidified silicon drop, reducing analysis time and contamination, and lowering detection limits, making it suitable for routine and cost-effective analysis.

Implementation Method 1

zone melting (zone pulling) to form a single silicon crystal having a conical end region, with a droplike melt forming at the end of the single silicon crystal

Methodology Applied
Scientific EffectZone melting:

Implementation Method 2

remelting of the silicon sample to reduce its diameter

Methodology Applied
Scientific EffectMelting: Melting

Implementation Method 3

cooling of the droplike melt to form a solidified silicon drop

Methodology Applied
Scientific EffectSolidification: Freezing

Implementation Method 4

partial or complete dissolution of the silicon drop in an acid

Methodology Applied
Scientific EffectDissolution:

Implementation Method 5

controlled etching process to analyze the impurities

Methodology Applied
Scientific EffectEtching:

Data Source

PatentUS12366567B2Method for determining trace metals in silicon
Publication Date: 2025.07.22 WACKER CHEMIE AG
  • US12366567B2 patent drawing
  • US12366567B2 patent drawing
  • US12366567B2 patent drawing

AI summary

A method for determining an amount of metallic impurities within silicon. The method includes the steps of (a) providing a rodlike silicon sample and a rodlike seed crystal in a zone melting apparatus, (b) zone melting to form a single silicon crystal having a conical end region with a droplike melt forming at the end of the single silicon crystal in a separation step, (c) cooling of the droplike melt to form a solidified silicon drop, (d) partial or complete dissolution of the silicon drop in an acid, and analyzing the solution obtained in step (d) by a trace analysis technique. Wherein the separation step further includes a remelting step for the silicon sample to reduce its diameter, forming a droplike melting zone, and separation of the seed crystal and the silicon sample by moving the seed crystal and the silicon sample apart from one another.