Silicon Waveguide PIN Junctions for Nonlinear Optical Effects

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Solution Overview

Problem

Silicon, a widely used material in photonics and CMOS processes, is centrosymmetric, making it challenging to induce nonlinear optical processes like second harmonic generation due to inhibited second-order nonlinear susceptibility (χ(2)) and weak electro-refractive effects.

Innovation Solution

The use of periodic electrical fields applied over waveguides with implanted ions to form compact p-i-n junctions, concentrating electric fields and converting third-order susceptibility (χ(3)) into second-order susceptibility (χ(2)), achieving phase matching for enhanced nonlinear effects such as second harmonic generation, sum frequency generation, and difference frequency generation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If silicon is used as a centrosymmetric material in waveguides, then the material is compatible with CMOS processes and widely available, but second-order nonlinear susceptibility is inhibited making nonlinear optical processes difficult to induce

Engineering Contradiction:
ImproveCMOS compatibilityVSAvoidnonlinear optical efficiency
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent introduces p-n junctions into the centrosymmetric silicon waveguide to create asymmetric regions. These junctions generate local electric fields that break the inversion symmetry of the silicon lattice, enabling second-order nonlinear optical effects while maintaining overall CMOS compatibility of the silicon material

Inventive Principle:
Principle #4Asymmetry

Solution Approach 2:

The patent modifies the electrical parameters of silicon by introducing doped regions (p-type and n-type). By controlling doping concentrations and applying bias voltages, the material's nonlinear susceptibility parameters are changed from zero (centrosymmetric) to non-zero values, enabling efficient nonlinear optical processes

Inventive Principle:
Principle #35Parameter changes

2Reliability

If electro-refractive effect based on free-carrier concentration change is used to initiate electro-optic processes, then certain electro-optic processes can be initiated in silicon, but the effect is weak compared to nonlinear crystals

Engineering Contradiction:
Improveelectro-optic process initiationVSAvoidnonlinear effect strength
Core Design Contradiction:
ReliabilityVSPower

Solution Approach 1:

Instead of relying on weak bulk electro-refractive effects throughout the waveguide, the patent creates localized regions of strong electric field at the p-n junctions. These localized high-field regions provide enhanced nonlinear optical interactions, concentrating the optical power where the electro-optic effect is strongest

Inventive Principle:
Principle #3Local quality

3Power

If p-n junctions are integrated into compact resonant micro-ring modulators to increase electro-refractive effect, then free-carriers can be rapidly injected or depleted to modulate permittivity, but bandwidth is limited by free-carrier lifetime and power consumption is high

Engineering Contradiction:
Improvepermittivity modulation capabilityVSAvoidmodulator bandwidth
Core Design Contradiction:
PowerVSSpeed

Solution Approach 1:

The patent utilizes the dynamic response of carriers in p-n junctions by applying time-varying bias voltages. The junctions can rapidly switch between different carrier concentration states, enabling high-speed modulation. The dynamic control of electric fields allows bandwidth extension beyond static electro-refractive limitations

Inventive Principle:
Principle #15Dynamics

4Reliability

If stressor SiN layer is deposited on silicon waveguide to induce large stress gradients for Pockels like modulation, then electro-optic effect can be generated, but process complexity increases and electro-optic design is limited

Engineering Contradiction:
Improveelectro-optic effect generationVSAvoidprocess complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent extracts the electro-optic functionality from external stressor layers and integrates it directly into the silicon waveguide through implanted p-n junctions. This eliminates the need for separate SiN stressor layer deposition and associated process complexity, while maintaining the desired Pockels-like modulation effect through field-induced χ(2) in the silicon itself

Inventive Principle:
Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Significantly enhances the efficiency of nonlinear optical effects by increasing second-order susceptibility, allowing for efficient phase matching and improved performance in silicon-based devices.

Implementation Method 1

converting the third order non-linear susceptibility χ(3) to second order non-linear susceptibility χ(2) by the external static or low frequency electric field. An external electric field can be applied to orient dipole moments in the direction of this field, breaking the crystalline symmetry.

Methodology Applied
Scientific EffectElectro-optic DC Kerr effect: Kerr Effect

Implementation Method 2

The waveguide includes a plurality of p-type regions comprising a p-type material on a first side of the waveguide and a plurality of n-type regions comprising an n-type material on a second side, opposite the first side, of the waveguide. The two electrodes apply a voltage between the first electrode and the second electrode so as to increase a second order susceptibility of the centrosymmetric material.

Methodology Applied
Scientific EffectElectric field concentration: Electric Field

Data Source

PatentUS10133149B2Apparatus and methods for generating nonlinear effects in centrosymmetric materials
Publication Date: 2018.11.20 MASSACHUSETTS INST OF TECH
  • US10133149B2 patent drawing
  • US10133149B2 patent drawing
  • US10133149B2 patent drawing

AI summary

A waveguide includes an array of p-i-n junctions formed by ions implanted into the waveguide. The p-i-n junctions concentrate electric fields applied on the waveguide to convert the third order susceptibility χ(3) into the second order susceptibility χ(2) and induce the DC Kerr effect. The periodic electrical fields concentrated by the p-i-n junctions effectively create a wave vector, which together with the wave vectors of optical beams in the waveguide satisfies phase matching conditions for nonlinear optical effects. The phase matching can significantly enhance the efficiency of the nonlinear optical effects, such as second harmonic generation, sum frequency generation, difference frequency generation, and four-wave mixing. Waveguides with arrays of PIN junctions can also be used in phase modulators, amplitude modulators, and filters.