Siloxane Photodegradable Coupling Agent for Fluorine-Free Pattern Formation

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Solution Overview

Problem

Current methods for forming patterns on substrates for fine devices, such as semiconductor elements and organic EL displays, rely on fluorine-containing compounds for creating hydrophilic and water-repellent regions, which raises environmental concerns due to fluorine residue, and lack effective alternatives.

Innovation Solution

A siloxane-based compound that changes its surface properties from water-repellent to hydrophilic upon light irradiation, allowing for the formation of hydrophilic and water-repellent regions without fluorine, enabling pattern formation and electroless plating processes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If fluorine-containing compounds are used to form hydrophilic and water-repellent regions, then pattern formation capability is improved, but environmental harm increases due to fluorine residue

Engineering Contradiction:
Improvepattern formation capabilityVSAvoidfluorine residue
Core Design Contradiction:
Manufacturing precisionVSObject-generated harmful factors

Solution Approach 1:

The invention changes the chemical composition parameter of the coupling agent from fluorine-containing to siloxane-based compounds. The siloxane compound contains a photodegradable group that undergoes structural change upon light irradiation, transforming the surface from water-repellent to hydrophilic. This parameter change eliminates fluorine residue while maintaining the ability to form patterns through controlled hydrophilic region creation.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The invention applies local quality by creating spatially differentiated regions on the substrate surface. Through selective light irradiation, only specific regions undergo photodegradation of the siloxane coupling agent, forming localized hydrophilic regions while other areas remain water-repellent. This local differentiation enables precise pattern formation without requiring fluorine-containing materials throughout the entire surface.

Inventive Principle:
Principle #3Local quality

2Object-generated harmful factors

If siloxane-based photodegradable coupling agents are used instead of fluorine-containing compounds, then environmental compatibility is improved, but the ability to form distinct hydrophilic regions may be compromised

Engineering Contradiction:
Improveenvironmental compatibilityVSAvoidhydrophilic region formation
Core Design Contradiction:
Object-generated harmful factorsVSManufacturing precision

Solution Approach 1:

The invention introduces dynamic responsiveness through the photodegradable group in the siloxane coupling agent. The surface properties are not static but can be dynamically changed from water-repellent to hydrophilic upon light irradiation. This dynamic characteristic allows the siloxane-based agent to achieve the same functional effect as fluorine-containing compounds, enabling reliable hydrophilic region formation while maintaining environmental compatibility.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The invention substitutes the chemical mechanism of fluorine-containing compounds with a photochemical mechanism using siloxane-based compounds. Instead of relying on fluorine's inherent water-repellent properties, the invention uses light-triggered photodegradation to transform siloxane from water-repellent to hydrophilic. This mechanism substitution maintains manufacturing precision while improving environmental compatibility by eliminating fluorine residue.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The compound effectively transforms surface properties in response to light, facilitating the formation of precise patterns and electroless plating without the environmental drawbacks of fluorine, enhancing the production of fine devices like semiconductor elements and organic EL displays.

Implementation Method 1

a siloxane-based compound that changes its surface properties from water-repellent to hydrophilic upon light irradiation

Methodology Applied
Scientific EffectPhotodegradation: Photodissociation

Data Source

PatentUS11953833B2Compound, substrate for pattern formation, photodegradable coupling agent, pattern formation method, and transistor production method
Publication Date: 2024.04.09 NIKON CORP
  • US11953833B2 patent drawing
  • US11953833B2 patent drawing
  • US11953833B2 patent drawing

AI summary

A compound represented by Formula (1). [In the formula, X represents a halogen atom or an alkoxy group, R1 represents any one group selected from an alkyl group having 1 to 5 carbon atoms, a group represented by Formula (R2-1), and a group represented by Formula (R2-2), R2 represents a group represented by Formula (R2-1) or (R2-2), n0 represents an integer of 0 or greater, n1 represents an integer of 0 to 5, and n2 represents a natural number of 1 to 5.]