Siloxane Photodegradable Coupling Agent for Pattern Formation

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

Existing methods for forming patterns on substrates for fine device production, such as semiconductor elements and organic EL displays, rely on fluorine-containing compounds that are environmentally undesirable and lack alternatives for creating hydrophilic and water-repellent regions effectively.

Innovation Solution

A siloxane-based compound that can modify a substrate's surface to be water-repellent and then photodegradable, allowing for the formation of hydrophilic regions upon light exposure, enabling the creation of patterns for functional materials and electroless plating processes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If fluorine-containing compounds are used to form hydrophilic and water-repellent regions on substrates, then pattern formation capability is achieved, but environmental sustainability deteriorates

Engineering Contradiction:

Improvepattern formation capabilityVSAvoidenvironmental sustainability

Core Design Contradiction:

Manufacturing precisionVSObject-affected harmful factors

Solution Approach 1:

The invention changes the chemical composition parameter from fluorine-containing compounds to siloxane-based compounds with specific molecular structures (Formula 1), maintaining the water-repellent properties while eliminating environmental harm. The compound undergoes photodegradation to transform from water-repellent to hydrophilic state, achieving pattern formation without fluorine.

Inventive Principle:

Principle #35Parameter changes

2Object-affected harmful factors

If photodegradable siloxane-based compounds are used to replace fluorine-containing materials, then environmental sustainability is improved, but the effectiveness of pattern formation may deteriorate

Engineering Contradiction:

Improveenvironmental sustainabilityVSAvoidpattern formation effectiveness

Core Design Contradiction:

Object-affected harmful factorsVSManufacturing precision

Solution Approach 1:

The siloxane-based compound is applied to the substrate in advance to create a uniform water-repellent coating before photodegradation. This preliminary action ensures that when light is applied, the photodegradation occurs on a well-prepared surface, maintaining pattern formation effectiveness while using environmentally benign materials.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The invention utilizes photodegradation to change the chemical and physical parameters of the siloxane-based compound, transforming it from a water-repellent state to a hydrophilic state upon light exposure. This parameter change enables precise pattern formation through controlled photodegradation while maintaining environmental sustainability.

Inventive Principle:

Principle #35Parameter changes

3Manufacturing precision

If amination and chemical modification steps are added to the pattern formation process, then the ability to create hydrophilic regions improves, but process complexity increases

Engineering Contradiction:

Improvehydrophilic region creation capabilityVSAvoidprocess complexity

Core Design Contradiction:

Manufacturing precisionVSDevice complexity

Solution Approach 1:

The amination step is performed in advance to introduce amino groups on the substrate surface, creating reactive sites for subsequent chemical modification. This preliminary action enables the siloxane-based compound to chemically bond to the substrate, improving adhesion and pattern formation while organizing the process into manageable sequential steps.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The amino groups act as an intermediary between the substrate and the siloxane-based compound, facilitating chemical modification and strong bonding. This intermediary enables effective hydrophilic region creation through controlled chemical reactions while providing a clear, systematic process flow that manages complexity.

Inventive Principle:

Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The compound effectively replaces fluorine-based materials, ensuring environmental sustainability while enabling precise pattern formation and electroless plating, enhancing the production of fine devices like transistors with improved hydrophilicity and water-repellency.

Implementation Method 1

a step of chemically modifying the aminated surface using the compound according to the first embodiment of the present invention

Methodology Applied

Scientific EffectAdsorption: Adsorption

Implementation Method 2

photodegradable coupling agent which is formed of the compound according to the first embodiment of the present invention

Methodology Applied

Scientific EffectPhotodegradation: Photodissociation

Data Source

PatentUS11225461B2Compound, substrate for pattern formation, photodegradable coupling agent, pattern formation method, and transistor production method

Publication Date: 2022.01.18 NIKON CORP

AI summary

Provided is a compound represented by Formula (1).