Silphenylene Polyether Resin Coating for Chemical Resistance

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Solution Overview

Problem

Existing photosensitive silicone compositions used for protecting semiconductor devices and circuit boards lack sufficient chemical resistance and durability, particularly against photoresist strippers and thermal cycling tests, leading to peeling and cracking issues.

Innovation Solution

A photosensitive resin composition comprising a silphenylene and polyether structure-containing polymer with crosslinking groups, combined with a photoacid generator, crosslinker, solvent, and quencher, which forms a robust and adhesive coating with improved chemical resistance and crack resistance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If a photosensitive silicone composition is used to achieve low temperature curing and good moisture resistant adhesion, then adhesion is improved, but chemical resistance against photoresist strippers deteriorates

Engineering Contradiction:
ImproveadhesionVSAvoidchemical resistance
Core Design Contradiction:
StrengthVSObject-affected harmful factors

Solution Approach 1:

The patent employs a composite polymer structure combining silphenylene units (for chemical resistance) with polyether chains (for adhesion and flexibility). This composite approach at the molecular level allows the cured coating to simultaneously achieve both good adhesion to substrates and resistance to chemical attack from photoresist strippers, resolving the contradiction between these two properties.

Inventive Principle:
Principle #40Composite materials

2Object-affected harmful factors

If a silphenylene structure-containing silicone polymer is used to improve chemical resistance, then chemical resistance is improved, but adhesion and crack resistance deteriorate in thermal cycling tests

Engineering Contradiction:
Improvechemical resistanceVSAvoidadhesion and crack resistance
Core Design Contradiction:
Object-affected harmful factorsVSReliability

Solution Approach 1:

The patent modifies the polymer structure by incorporating flexible polyether chains between the rigid silphenylene units. This structural parameter change introduces molecular flexibility that allows the coating to accommodate thermal expansion and contraction during cycling, preventing cracks and maintaining adhesion while preserving the chemical resistance provided by the silphenylene structure.

Inventive Principle:
Principle #35Parameter changes

3Object-affected harmful factors

If a photosensitive resin coating is formed to provide chemical resistance, then chemical resistance is improved, but pattern forming ability and film properties deteriorate

Engineering Contradiction:
Improvechemical resistanceVSAvoidpattern forming ability
Core Design Contradiction:
Object-affected harmful factorsVSManufacturing precision

Solution Approach 1:

The patent incorporates crosslinking groups at specific locations within the polymer chain (every 2-20 repeating units) to create localized crosslinked regions. These local crosslinked zones provide chemical resistance and structural integrity, while the remaining non-crosslinked polyether segments maintain flexibility and processability, enabling good pattern forming ability and film properties.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The composition achieves enhanced adhesion, chemical resistance, and mechanical properties, ensuring reliable performance as a protective film and resist material for electronic parts, even under thermal cycling tests.

Implementation Method 1

a photoacid generator (B)

Methodology Applied
Scientific EffectPhotoacid generation: Photopolymerisation

Data Source

PatentUS11262655B2Photosensitive resin composition, photosensitive dry film, and pattern forming process
Publication Date: 2022.03.01 SHIN ETSU CHEMICAL CO LTD
  • US11262655B2 patent drawing
  • US11262655B2 patent drawing
  • US11262655B2 patent drawing

AI summary

A photosensitive resin composition comprising (A) a silphenylene and polyether structure—containing polymer and (B) a photoacid generator is coated onto a substrate to form a photosensitive resin coating which has improved substrate adhesion, a pattern forming ability, crack resistance, and reliability as protective film.