Silver Alloy Electrical Lapping Guides for Disk Drive Slider Fabrication

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Solution Overview

Problem

Conventional electrical lapping guides (ELGs) in magnetic recording disk drives have unpredictable electrical resistance due to tapered back edges, which are formed simultaneously with magnetoresistive read sensors, and require a higher etch rate to achieve a non-tapered flat edge while maintaining a sheet resistance matching the lapping tool's capability.

Innovation Solution

Forming the ELG from a different material, such as an alloy comprising silver (Ag) and tin (Sn) with a higher etch rate and electrical resistivity, allowing for a sharp, well-defined non-tapered back edge and stable resistance measurement during the lapping process, while maintaining a film thickness similar to the MR sensor stack.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If the ELG is formed from the same materials as the MR sensor, then the manufacturing process is simplified, but the ELG back edge becomes tapered resulting in unpredictable electrical resistance

Engineering Contradiction:
Improvemanufacturing process simplicityVSAvoidelectrical resistance predictability
Core Design Contradiction:
Ease of manufactureVSMeasurement precision

Solution Approach 1:

The patent changes the material composition of the ELG from matching the MR sensor stack to using a distinct material (such as tungsten, molybdenum, or tungsten silicide) with different etching characteristics. This parameter change in material composition enables the ELG to maintain a flat back edge during lapping while still being formed in the same manufacturing process, thereby resolving the contradiction between manufacturing simplicity and resistance predictability.

Inventive Principle:
Principle #35Parameter changes

2Measurement precision

If the ELG film is made thinner to achieve a flat back edge, then the electrical resistance becomes predictable, but the sheet resistance no longer matches the lapping equipment requirements

Engineering Contradiction:
Improveelectrical resistance predictabilityVSAvoidsheet resistance matching
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The patent changes the material parameter of the ELG to achieve a higher etch rate relative to the MR sensor stack. This allows the ELG to be etched completely through to form a flat back edge while maintaining an appropriate film thickness for the desired sheet resistance, thus simultaneously achieving both predictable resistance and proper sheet resistance matching.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent employs composite material selection where the ELG is made from a material distinct from the MR sensor stack materials. This composite approach allows independent optimization of etching properties for flat back edge formation while maintaining electrical properties for proper sheet resistance, resolving the contradiction between resistance predictability and sheet resistance matching.

Inventive Principle:
Principle #40Composite materials

3Ease of manufacture

If the ELG has the same etch rate as the MR sensor stack, then both are etched simultaneously, but the ELG back edge becomes tapered and surface area becomes unpredictable

Engineering Contradiction:
Improvesimultaneous etchingVSAvoidback edge flatness
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The patent changes the etch rate parameter of the ELG material to be higher than that of the MR sensor stack. This differential etch rate allows both structures to be etched simultaneously in the same process step while ensuring the ELG is completely removed to form a flat back edge, thereby maintaining manufacturing simplicity while achieving precise back edge geometry.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The high etch rate and resistivity of the AgSn alloy ensure a predictable electrical resistance and prevent corrosion, enabling precise control of the stripe height of the MR sensor with a stable resistance measurement and a non-tapered ELG back edge, enhancing the manufacturing process.

Implementation Method 1

the ELG material has a substantially higher rate of etching than the material of the MR sensor

Methodology Applied
Scientific EffectEtching:

Implementation Method 2

a high corrosion resistance, which prevents corrosion during the wet lapping process

Methodology Applied
Scientific EffectCorrosion resistance:

Data Source

PatentUS8739391B2Silver alloy electrical lapping guides (ELGs) for fabrication of disk drive sliders with magnetoresistive sensors
Publication Date: 2014.06.03 WESTERN DIGITAL TECHNOLOGIES INC
  • US8739391B2 patent drawing
  • US8739391B2 patent drawing
  • US8739391B2 patent drawing

AI summary

An air-bearing slider used in a magnetic recording disk drive has a surface that supports a magnetoresistive (MR) read head or sensor and an electrical lapping guide (ELG) adjacent to the MR sensor. The ELG is formed of a different material than the MR sensor so as to have both a high electrical resistivity and a substantially higher etch rate. When the ELG and MR sensor are etched simultaneously to form their respective back edges, the ELG will have a sharp well-defined non-tapered wall at the back edge. The ELG has a film thickness close to but generally thinner than that of the MR sensor, and a sheet resistance to generally match the resistance measurement capability of the lapping tool. The preferred material for the ELG is an alloy comprising silver (Ag) and one or more of Sn, Ge and zinc Zn.