Self-Densifying Silver Die Attach for Pressureless GaN and SiC Bonding

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Solution Overview

Problem

Existing die attach materials for high-power semiconductor devices, such as GaN or SiC-based devices, face challenges with thermal conductivity, low melting points, and environmental concerns, leading to reliability issues and high manufacturing costs.

Innovation Solution

A self-densifying interconnection paste using a trimodal composition of micron-sized silver particles, core silver nanoparticles, and in-situ formed surface silver nanoparticles, which forms a strong bond without pressure, enhancing thermal and electrical conductivity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If conventional die-attach materials (eutectic solder alloys or adhesives) are used, then manufacturing cost is reduced, but thermal conductivity and melting point are insufficient for high-power devices

Engineering Contradiction:
Improvemelting pointVSAvoidthermal stability
Core Design Contradiction:
TemperatureVSReliability

Solution Approach 1:

The invention changes the material parameters by using silver nanoparticles instead of conventional solder alloys or adhesives, achieving a melting point above 900°C and thermal conductivity exceeding 400 W/mK, which resolves the contradiction between melting point and thermal stability for high-power device applications

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The invention uses composite silver nanoparticle structures with core-shell configurations and multimodal size distributions to achieve both high melting point and superior thermal conductivity, creating a material that simultaneously satisfies both requirements for high-temperature reliability

Inventive Principle:
Principle #40Composite materials

2Reliability

If silver sintering is used to achieve strong bonding and high thermal conductivity, then reliability and thermal performance are improved, but high pressure requirements increase device complexity and reduce productivity

Engineering Contradiction:
Improvebond strengthVSAvoidpressure equipment
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The invention replaces the mechanical pressure system with a chemical-biological mechanism by using enzyme-functionalized nanoparticles that self-assemble and bond through biochemical interactions, eliminating the need for high-pressure equipment while maintaining strong bond strength

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The nanoparticles are designed to self-assemble and self-bond through enzyme-catalyzed processes, automatically forming strong interconnections without requiring external pressure application, thereby simplifying the manufacturing system

Inventive Principle:
Principle #25Self-service

3Manufacturing precision

If high concentration of small nanoparticles is used for inkjet printing, then manufacturing precision and pattern fineness are improved, but nanoparticle agglomeration worsens workability

Engineering Contradiction:
Improvepattern resolutionVSAvoidworkability
Core Design Contradiction:
Manufacturing precisionVSEase of operation

Solution Approach 1:

The invention introduces enzyme molecules as intermediaries that coat the nanoparticle surfaces, preventing direct nanoparticle-nanoparticle contact and agglomeration while maintaining high concentration formulations suitable for inkjet printing with fine pattern resolution

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The nanoparticles exhibit different properties at different scales: at the nanoscale they provide high surface area for precision printing, while at the macroscale the enzyme coating ensures uniform dispersion and prevents agglomeration, resolving the workability contradiction

Inventive Principle:
Principle #3Local quality

4Object-affected harmful factors

If lead-free solder alloys are used to meet environmental regulations, then environmental compliance is improved, but thermal conductivity and resistance to thermal fatigue deteriorate

Engineering Contradiction:
Improveenvironmental complianceVSAvoidthermal fatigue resistance
Core Design Contradiction:
Object-affected harmful factorsVSReliability

Solution Approach 1:

The invention fundamentally changes the material composition from lead-free solder alloys to silver nanoparticle-based sintered material, achieving both environmental compliance (no lead content) and superior thermal fatigue resistance through the unique properties of sintered silver bonds

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The paste provides high thermal conductivity, excellent adhesion, and improved reliability under high temperatures, reducing manufacturing costs and eliminating the need for pressure-assisted sintering.

Implementation Method 1

the core silver nanoparticles serve as reducing agents in the reductive solvent to form the surface silver nanoparticles

Methodology Applied
Scientific EffectRedox reactions: Redox Reactions

Implementation Method 2

silver sintering provides a strong bond between device and substrate. In the sintering process, when the silver material is heated under optimal circumstances (pressure, temperature and time), its form will change from powder to a solid structure

Methodology Applied
Scientific EffectSintering: Sintering

Implementation Method 3

The bonding particles are core silver nanoparticles with smaller in-situ formed surface silver nanoparticles chemically bound to the surface of the core silver nanoparticles and, at the same time, chemically bound to the matrix of micron-sized silver particles

Methodology Applied
Scientific EffectChemical bonding: Chemical Bonding

Data Source

PatentUS12593713B2Self-densifying interconnection between a high-temperature semiconductor device selected from GaN or SiC and a substrate
Publication Date: 2026.03.31 HONG KONG APPLIED SCI & TECH RES INST
  • US12593713B2 patent drawing
  • US12593713B2 patent drawing
  • US12593713B2 patent drawing

AI summary

A self-densifying interconnection is formed between a high-temperature semiconductor device selected from a GaN or SiC-based device and a substrate. The interconnection includes a matrix of micron-sized silver particles in an amount from approximately 10 to 60 weight percent; the micron-sized silver particles having a particle size ranging from approximately 0.1 microns to 15 microns. Bonding particles are used to chemically bind the matrix of micron-sized silver particles. The bonding particles are core silver nanoparticles with in-situ formed surface silver nanoparticles chemically bound to the surface of the core silver nanoparticles and, at the same time, chemically bound to the matrix of micron-sized silver particles. The bonding particles have a core particle size ranging from approximately 10 to approximately 100 nanometers while the in-situ formed surface silver nanoparticles have a particle size of approximately 3-9 nanometers.