Silver Gate Wiring with Self-Assembled Monolayer Mask
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Solution Overview
Problem
The existing methods for forming gate wiring in LCD devices using silver metal layers face challenges in achieving uniformity in line width and surface state, and are costly due to high silver usage and oxidation issues, particularly when using photolithography or printing methods.
Innovation Solution
A dual-layered structure comprising a self-assembled monolayer and a metal layer of silver is used for the gate wiring, where the self-assembled monolayer is formed on the insulating substrate and serves as an etching mask to pattern the silver layer, improving adherence and uniformity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If photolithography or printing methods are used to form gate wiring with silver metal layer, then the gate wiring can be formed, but uniformity in line width and surface state deteriorates
Solution Approach 1:
A self-assembled monolayer is formed on the insulating substrate before depositing the silver metal layer. This preliminary action creates a controlled surface that guides silver atom arrangement, ensuring uniform line width and surface state while improving adherence and reducing oxidation.
Solution Approach 2:
The self-assembled monolayer acts as an intermediary between the insulating substrate and the silver metal layer. It provides a controlled interface that improves adhesion, prevents direct contact between silver and oxygen (reducing oxidation), and guides the formation of uniform gate wiring patterns.
2Reliability
If high amounts of silver are used in gate wiring formation, then good conductivity is achieved, but fabrication cost increases
Solution Approach 1:
The self-assembled monolayer creates locally optimized regions where silver atoms are precisely positioned and densely packed. This local quality enhancement ensures high electrical conductivity in the gate wiring while reducing the total amount of silver needed, as the metal layer can be thinner and more efficiently utilized.
3Ease of manufacture
If conventional methods are used to form gate wiring, then the process can be completed, but fabrication complexity and cost increase due to multiple steps
Solution Approach 1:
The formation of the self-assembled monolayer and the silver metal deposition are merged into an integrated process sequence. The monolayer formation serves multiple functions simultaneously: it prepares the surface, guides pattern formation, and provides protection, thereby simplifying the overall fabrication process while maintaining precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces silver usage, enhances the uniformity of the gate line and surface state, and simplifies the fabrication process by improving adhesion and reducing oxidation, thereby lowering fabrication costs and increasing efficiency.
Implementation Method 1
a self-assembled monolayer is formed on the insulating substrate and serves as an etching mask to pattern the silver layer
Implementation Method 2
improving adherence and uniformity... reducing oxidation
Data Source
AI summary
An LCD device and a method of fabricating the device, in which the method includes preparing an insulating substrate including a gate wiring area and sequentially forming a gate wiring layer including a silver layer and a self-assembled monolayer on the insulating substrate. A mold mask is positioned above the insulating substrate, where the mold mask has a predetermined pattern to expose the gate wiring area. A self-assembled monolayer pattern is formed by printing the predetermined pattern of the mold mask into the self-assembled monolayer and a gate wiring pattern is formed by selectively etching the silver layer using the self-assembled monolayer pattern as an etching mask, where the gate wiring pattern includes a gate pad, a gate electrode and a gate line. The LCD device includes a gate wiring layer including a self-assembled monolayer and a metal layer of silver overlying an insulating substrate.